Methods and systems of optimizing pressure regulation at intelligent gas gate stations based on internet of things

Z Shao, WU Yuefei, Z Junyan, Q Yaqiang… - US Patent …, 2024 - Google Patents
A method and system of optimizing pressure regulation at an intelligent gas gate station
based on an Internet of Things are provided. The method is performed by an intelligent gas …

Diagnostic methods for substrate manufacturing chambers using physics-based models

VR Kasibhotla, T Zhang, X Zou, BS Balaji - US Patent 12,147,212, 2024 - Google Patents
A method includes receiving first sensor data, generated during a manufacturing process by
sensors associated with a substrate manufacturing chamber. The method further includes …

Methods and internet of things systems for controlling automatic odorization of smart gas device management

Z Shao, H Xiang, Q Yaqiang, Y Li, X Wei - US Patent 11,828,422, 2023 - Google Patents
The embodiments of the present disclosure provide methods and Internet of Things systems
for controlling automatic odorization of smart gas device management. The method may …

Method for determining odorization parameters of smart gas device management and internet of things system thereof

Z Shao, H Xiang, Q Yaqiang, Y Li, X Wei - US Patent 12,038,138, 2024 - Google Patents
The embodiments of the present disclosure provide method and Internet of Things system
for determining odorization parameters of smart gas device management. The method may …