Advanced protective coatings for reflectivity enhancement by low temperature atomic layer deposition of HfO2 on Al surfaces for micromirror applications
We report on the implementation of thin atomic layer deposited coatings for environmental
protection and reflectivity enhancement of Al-based micromirror devices. The reflectance …
protection and reflectivity enhancement of Al-based micromirror devices. The reflectance …
New method to evaluate materials outgassing used in MEMS thin film packaging technology
B Savornin, X Baillin, E Blanquet, I Nuta… - Microelectronic …, 2013 - Elsevier
In this paper, a new method to characterize materials outgassing behavior is detailed. The
understanding of these phenomena during all the process steps is required to improve …
understanding of these phenomena during all the process steps is required to improve …
MEMS device, manufacturing method of the same, and integrated MEMS module using the same
HC Chang, JJ Huang, T Chih-Ya, JY Lin - US Patent 11,939,212, 2024 - Google Patents
A MEMS device is provided. The MEMS device includes a substrate having at least one
contact, a first dielectric layer disposed on the substrate, at least one metal layer disposed …
contact, a first dielectric layer disposed on the substrate, at least one metal layer disposed …
MEMS device and manufacturing method of the same
HC Chang, JJ Huang, T Chih-Ya, JY Lin - US Patent 11,365,117, 2022 - Google Patents
A MEMS device is provided. The MEMS device includes a substrate having at least one
contact, a first dielectric layer disposed on the substrate, at least one metal layer disposed …
contact, a first dielectric layer disposed on the substrate, at least one metal layer disposed …