Recent advances brought the performance of MEMS-based varifocal mirrors to levels
comparable to conventional ultra-high-speed focusing devices. Varifocal mirrors are …

A novel MEMS continuous deformable mirror (DM) is presented. The mirror can be
integrated into optical systems to compensate for monochromatic and chromatic aberrations …

We report the design, fabrication, and characterization of a resonant varifocal micromirror
excited with thin-film piezoelectric actuators. The mirror features a spiral suspension …

The reconstruction using MEMS micro-vibration mirrors is the most promising. However, the
influence mechanism of the line laser, which serves as the sole light source of MEMS-based …

This paper presents a novel varifocal mirror made of a micro-electromechanical system
(MEMS) continuous deformable mirror (DM). It uses resonant electrostatic actuation (REA) …

A piezoelectrically actuated two-dimensional micromirror with varifocal function is
demonstrated. The tilting functions and the varifocal function are operated using PZT thin …