Manual surface inspection methods performed by quality inspectors do not satisfy the
continuously increasing quality standards of industrial manufacturing processes. Machine …

Electronics industry is one of the fastest evolving, innovative, and most competitive
industries. In order to meet the high consumption demands on electronics components …

Wafer maps provide important information for engineers in identifying root causes of die
failures during semiconductor manufacturing processes. We present a method for wafer map …

Defect pattern recognition (DPR) of wafer maps is critical for determining the root cause of
production defects, which can provide insights for the yield improvement in wafer foundries …

Wafer maps contain information about various defect patterns on the wafer surface and
automatic classification of these defects plays a vital role to find their root causes …

A wafer map contains a graphical representation of the locations about defect pattern on the
semiconductor wafer, which can provide useful information for quality engineers. Various …

With the high demand and sub-nanometer design for integrated circuits, surface defect
complexity and frequency for semiconductor wafers have increased; subsequently …

Abnormal defect pattern detection plays a key role in preventing yield loss excursion events
for the semiconductor manufacturing. We present a method for detecting and segmenting …

Identification of the defective patterns of the wafer maps can provide insights for the quality
control in the semiconductor wafer fabrication systems (SWFSs). In real SWFSs, the …

Wafer maps contain information about defects and clustered defects that form failure
patterns. Failure patterns exhibit the information related to defect generation mechanisms …