Anomalous capacitance characteristics of TFTs with LDD structures in the saturation region
The effect of lightly doped drain (LDD) doping concentration on the capacitance of a low-
temperature polycrystalline silicon (LTPS) thin-film transistor (TFT) is investigated. An …
temperature polycrystalline silicon (LTPS) thin-film transistor (TFT) is investigated. An …