Anomalous capacitance characteristics of TFTs with LDD structures in the saturation region

M Kim, W Sun, M Shin, K Kim, J Kang… - Semiconductor Science …, 2016 - iopscience.iop.org
The effect of lightly doped drain (LDD) doping concentration on the capacitance of a low-
temperature polycrystalline silicon (LTPS) thin-film transistor (TFT) is investigated. An …