The motivation of the current paper is to provide a detailed review of crucial topics in micro-
and nanoscale gas flows, ie, velocity slip and temperature jump phenomena and their …

Increasing interest in development of very low Earth orbit (VLEO) has attracted more and
more researchers to study atmosphere-breathing electric propulsion (ABEP) system in past …

The transition from old space to new space along with increasing commercialization has a
major impact on space flight, in general, and on electric propulsion (EP) by ion thrusters, in …

Liquid/vapour interfaces govern the behaviour of a wide range of systems but remain poorly
understood, leaving ample margin for the exploitation of intriguing functionalities for …

An assessment of high-temperature mass spectrometry and of sources of inaccuracy is
made. Experimental, calculated, and estimated cross-sections for ionization of atoms and …

Following a brief historical introduction an overview is given relating the most recent studies
of rarefied gas flow to the early work of Knudsen. The first paper submitted in October 1908 …

The key optical components of X-ray grating interferometry are gratings, whose profile
requirements play the most critical role in acquiring high quality images. The difficulty of …

Modern Vacuum Physics presents the principles and practices of vacuum science and
technology along with a number of applications in research and industrial production. The …

In this article, we give an overview about the chemical and physical processes that play a
role in etching at lower wafer temperatures. Conventionally, plasma etching processes rely …

Fabrication of semiconductor devices having three-dimensional (3D) structures places
unprecedented demands on plasma etching processes. Among these demands is the …