Tailored-waveform excitation of capacitively coupled plasmas and the electrical asymmetry effect
T Lafleur - Plasma Sources Science and Technology, 2015 - iopscience.iop.org
Unequal areas of the powered and grounded electrodes in single-frequency capacitively
coupled plasmas (CCPs) are well-known to generate a DC self-bias voltage and an …
coupled plasmas (CCPs) are well-known to generate a DC self-bias voltage and an …
Effects of structured electrodes on electron power absorption and plasma uniformity in capacitive RF discharges
The electron power absorption dynamics and plasma uniformity in low pressure capacitively
coupled RF discharges with structured electrodes are investigated by graphics processing …
coupled RF discharges with structured electrodes are investigated by graphics processing …
Ion flux asymmetry in radiofrequency capacitively-coupled plasmas excited by sawtooth-like waveforms
Using particle-in-cell simulations, we predict that it is possible to obtain a significant
difference between the ion flux to the powered electrode and that to the grounded electrode …
difference between the ion flux to the powered electrode and that to the grounded electrode …
Control and optimization of the slope asymmetry effect in tailored voltage waveforms for capacitively coupled plasmas
Through the use of particle-in-cell simulations, we study the ion flux asymmetry in an argon
discharge that is induced by a'sawtooth-like'excitation voltage waveform. In a previous …
discharge that is induced by a'sawtooth-like'excitation voltage waveform. In a previous …
Radio-frequency capacitively coupled plasmas in hydrogen excited by tailored voltage waveforms: comparison of simulations with experiments
A combined computational–experimental study was performed of a geometrically symmetric
capacitively coupled plasma in hydrogen sustained by tailored voltage waveforms …
capacitively coupled plasma in hydrogen sustained by tailored voltage waveforms …
[HTML][HTML] Experimental demonstration of multifrequency impedance matching for tailored voltage waveform plasmas
J Wang, S Diné, JP Booth, EV Johnson - Journal of Vacuum Science & …, 2019 - pubs.aip.org
Driving radiofrequency capacitively coupled plasmas by multiharmonic tailored voltage
waveforms (TVWs) has been shown to allow considerable control over various plasma …
waveforms (TVWs) has been shown to allow considerable control over various plasma …
The importance of ions in low pressure PECVD plasmas
A Michelmore, JD Whittle, RD Short - Frontiers in Physics, 2015 - frontiersin.org
Plasma enhanced chemical vapor deposition (PECVD) can be used to fabricate surfaces
with a wide range of physical and chemical properties and are used in a variety of …
with a wide range of physical and chemical properties and are used in a variety of …
Controlling plasma properties under differing degrees of electronegativity using odd harmonic dual frequency excitation
The charged particle dynamics in low-pressure oxygen plasmas excited by odd harmonic
dual frequency waveforms (low frequency of 13.56 MHz and high frequency of 40.68 MHz) …
dual frequency waveforms (low frequency of 13.56 MHz and high frequency of 40.68 MHz) …
The role of thermal energy accommodation and atomic recombination probabilities in low pressure oxygen plasmas
Surface interaction probabilities are critical parameters that determine the behaviour of low
pressure plasmas and so are crucial input parameters for plasma simulations that play a key …
pressure plasmas and so are crucial input parameters for plasma simulations that play a key …
Evaluation of the electrical asymmetry effect by spectroscopic measurements of capacitively coupled discharges and silicon thin film depositions
E Schüngel, R Hofmann, S Mohr, J Schulze, J Röpcke… - Thin Solid Films, 2015 - Elsevier
A capacitively coupled hydrogen diluted silane discharge operated at pressures above 500
Pa and driven by a combination of 13.56 MHz and 27.12 MHz is investigated by infrared …
Pa and driven by a combination of 13.56 MHz and 27.12 MHz is investigated by infrared …