Review of piezoelectric micromachined ultrasonic transducers for rangefinders
J Pan, C Bai, Q Zheng, H Xie - Micromachines, 2023 - mdpi.com
Piezoelectric micromachined ultrasonic transducer (pMUT) rangefinders have been rapidly
developed in the last decade. With high output pressure to enable long-range detection and …
developed in the last decade. With high output pressure to enable long-range detection and …
Phased array based on AlScN Piezoelectric Micromachined Ultrasound Transducers monolithically integrated on CMOS
In this work we present an array of piezoelectric micromachined ultrasound transducer
(PMUT's) based on AlScN piezoelectric layer, monolithically integrated on top of a 130 nm …
(PMUT's) based on AlScN piezoelectric layer, monolithically integrated on top of a 130 nm …
Monolithic sensor integration in CMOS technologies
Besides being mainstream for mixed-signal electronics, CMOS technology can be used to
integrate micro-electromechanical system (MEMS) on a single die, taking advantage of the …
integrate micro-electromechanical system (MEMS) on a single die, taking advantage of the …
Al2O3 厚度对SAW 传感器声波模式及性能的影响.
刘强， 李鸿源， 徐鸿 - Piezoelectrics & Acoustooptics, 2023 - search.ebscohost.com
(华北电力大学能源动力与机械工程学院, 北京102206) 摘要: 该文采用多物理场耦合的有限元
模型, 探究了保护层Al2O3 厚度对以LGS 为压电基底, Pt 为电极的声表面波(SAW) …
模型, 探究了保护层Al2O3 厚度对以LGS 为压电基底, Pt 为电极的声表面波(SAW) …
用于减小PMUT" 盲区" 的回波检测方法.
王光华， 张玉超， 胡益民， 苗斌… - Piezoelectrics & …, 2023 - search.ebscohost.com
3. 中国科学院多功能材料与轻巧系统重点实验室, 江苏苏州215123; 4. 上海师范大学数理学院,
上海200234) 摘要: 收发一体式压电微机械超声波换能器(PMUT) 的接收信号存在较长的拖尾 …
上海200234) 摘要: 收发一体式压电微机械超声波换能器(PMUT) 的接收信号存在较长的拖尾 …
Design of a front-end ASIC for a fully integrated ultrasound PMUT array in CMOS
I Zamora - 2022 - ddd.uab.cat
Avui en dia, els avenços en transductors ultrasònics MEMS miniaturitzats requereixen grans
esforços en el disseny dels circuits electrònics d'interfície per tal d'aprofitar el seu menor …
esforços en el disseny dels circuits electrònics d'interfície per tal d'aprofitar el seu menor …