[HTML][HTML] Atomic layer deposition for nanoscale oxide semiconductor thin film transistors: review and outlook
HM Kim, DG Kim, YS Kim, M Kim… - International Journal of …, 2023 - iopscience.iop.org
Since the first report of amorphous In–Ga–Zn–O based thin film transistors, interest in oxide
semiconductors has grown. They offer high mobility, low off-current, low process …
semiconductors has grown. They offer high mobility, low off-current, low process …
extremely thin amorphous indium oxide transistors
Amorphous oxide semiconductor transistors have been a mature technology in display
panels for upward of a decade, and have recently been considered as promising back‐end …
panels for upward of a decade, and have recently been considered as promising back‐end …
[HTML][HTML] Atomic layer deposition of conductive and semiconductive oxides
B Macco, WMM Kessels - Applied Physics Reviews, 2022 - pubs.aip.org
Conductive and semiconductive oxides constitute a class of materials of which the electrical
conductivity and optical transparency can be modulated through material design (eg, doping …
conductivity and optical transparency can be modulated through material design (eg, doping …
Remarkable Stability Improvement with a High‐Performance PEALD‐IZO/IGZO Top‐Gate Thin‐Film Transistor via Modulating Dual‐Channel Effects
YS Kim, WB Lee, HJ Oh, TH Hong… - Advanced Materials …, 2022 - Wiley Online Library
Plasma‐enhanced atomic layer deposition (PEALD)‐based bilayer IZO (back channel)/IGZO
top‐gate thin‐film transistors (TFTs) with different IZO and IGZO layer thicknesses are …
top‐gate thin‐film transistors (TFTs) with different IZO and IGZO layer thicknesses are …
Sequential infiltration synthesis of electronic materials: group 13 oxides via metal alkyl precursors
The sequential infiltration synthesis (SIS) of group 13 indium and gallium oxides (In2O3 and
Ga2O3) into poly (methyl methacrylate)(PMMA) thin films is demonstrated using …
Ga2O3) into poly (methyl methacrylate)(PMMA) thin films is demonstrated using …
High mobility ultra-thin crystalline indium oxide thin film transistor using atomic layer deposition
Stoichiometric crystalline binary metal oxide thin films can be used as channel materials for
transparent thin film transistors. However, the nature of the process used to fabricate these …
transparent thin film transistors. However, the nature of the process used to fabricate these …
Recent developments in molecular precursors for atomic layer deposition
AL Johnson, JD Parish - 2018 - books.rsc.org
One field of organometallic and materials chemistry that has seen great advancements over
the last 20 years is that of atomic layer deposition (ALD), and in particular the development …
the last 20 years is that of atomic layer deposition (ALD), and in particular the development …
Review of Material Properties of Oxide Semiconductor Thin Films Grown by Atomic Layer Deposition for Next-Generation 3D Dynamic Random-Access Memory …
AR Choi, DH Lim, SY Shin, HJ Kang, D Kim… - Chemistry of …, 2024 - ACS Publications
Dynamic random-access memory (DRAM) devices are essential volatile memory
components in most digital devices. With the increasing demand for further low-power and …
components in most digital devices. With the increasing demand for further low-power and …
[HTML][HTML] Growth Temperature Influence on Atomic-Layer-Deposited In2O3 Thin Films and Their Application in Inorganic Perovskite Solar Cells
U Farva, HW Lee, RN Kim, DG Lee, DW Kang, J Kim - Nanomaterials, 2021 - mdpi.com
Recently, indium oxide (In2O3) thin films have emerged as a promising electron transport
layer (ETL) for perovskite solar cells; however, solution-processed In2O3 ETL suffered from …
layer (ETL) for perovskite solar cells; however, solution-processed In2O3 ETL suffered from …
[HTML][HTML] Thermal atomic layer deposition of In 2 O 3 thin films using a homoleptic indium triazenide precursor and water
Indium oxide (In2O3) is an important transparent conducting material widely used in
optoelectronic applications. Herein, we study the deposition of In2O3 by thermal atomic …
optoelectronic applications. Herein, we study the deposition of In2O3 by thermal atomic …