[HTML][HTML] Atomic layer deposition for nanoscale oxide semiconductor thin film transistors: review and outlook

HM Kim, DG Kim, YS Kim, M Kim… - International Journal of …, 2023 - iopscience.iop.org
Since the first report of amorphous In–Ga–Zn–O based thin film transistors, interest in oxide
semiconductors has grown. They offer high mobility, low off-current, low process …

extremely thin amorphous indium oxide transistors

A Charnas, Z Zhang, Z Lin, D Zheng… - Advanced …, 2024 - Wiley Online Library
Amorphous oxide semiconductor transistors have been a mature technology in display
panels for upward of a decade, and have recently been considered as promising back‐end …

[HTML][HTML] Atomic layer deposition of conductive and semiconductive oxides

B Macco, WMM Kessels - Applied Physics Reviews, 2022 - pubs.aip.org
Conductive and semiconductive oxides constitute a class of materials of which the electrical
conductivity and optical transparency can be modulated through material design (eg, doping …

Remarkable Stability Improvement with a High‐Performance PEALD‐IZO/IGZO Top‐Gate Thin‐Film Transistor via Modulating Dual‐Channel Effects

YS Kim, WB Lee, HJ Oh, TH Hong… - Advanced Materials …, 2022 - Wiley Online Library
Plasma‐enhanced atomic layer deposition (PEALD)‐based bilayer IZO (back channel)/IGZO
top‐gate thin‐film transistors (TFTs) with different IZO and IGZO layer thicknesses are …

Sequential infiltration synthesis of electronic materials: group 13 oxides via metal alkyl precursors

RZ Waldman, N Jeon, DJ Mandia… - Chemistry of …, 2019 - ACS Publications
The sequential infiltration synthesis (SIS) of group 13 indium and gallium oxides (In2O3 and
Ga2O3) into poly (methyl methacrylate)(PMMA) thin films is demonstrated using …

High mobility ultra-thin crystalline indium oxide thin film transistor using atomic layer deposition

J Lee, J Moon, JE Pi, SD Ahn, H Oh, SY Kang… - Applied Physics …, 2018 - pubs.aip.org
Stoichiometric crystalline binary metal oxide thin films can be used as channel materials for
transparent thin film transistors. However, the nature of the process used to fabricate these …

Recent developments in molecular precursors for atomic layer deposition

AL Johnson, JD Parish - 2018 - books.rsc.org
One field of organometallic and materials chemistry that has seen great advancements over
the last 20 years is that of atomic layer deposition (ALD), and in particular the development …

Review of Material Properties of Oxide Semiconductor Thin Films Grown by Atomic Layer Deposition for Next-Generation 3D Dynamic Random-Access Memory …

AR Choi, DH Lim, SY Shin, HJ Kang, D Kim… - Chemistry of …, 2024 - ACS Publications
Dynamic random-access memory (DRAM) devices are essential volatile memory
components in most digital devices. With the increasing demand for further low-power and …

[HTML][HTML] Growth Temperature Influence on Atomic-Layer-Deposited In2O3 Thin Films and Their Application in Inorganic Perovskite Solar Cells

U Farva, HW Lee, RN Kim, DG Lee, DW Kang, J Kim - Nanomaterials, 2021 - mdpi.com
Recently, indium oxide (In2O3) thin films have emerged as a promising electron transport
layer (ETL) for perovskite solar cells; however, solution-processed In2O3 ETL suffered from …

[HTML][HTML] Thermal atomic layer deposition of In 2 O 3 thin films using a homoleptic indium triazenide precursor and water

P Mpofu, P Rouf, NJ O'Brien, U Forsberg… - Dalton …, 2022 - pubs.rsc.org
Indium oxide (In2O3) is an important transparent conducting material widely used in
optoelectronic applications. Herein, we study the deposition of In2O3 by thermal atomic …