PMUT and CMUT devices for biomedical applications: A review

E Moisello, L Novaresi, E Sarkar, P Malcovati… - IEEE …, 2024 - ieeexplore.ieee.org
Piezoelectric Micromachined Ultrasonic Transducers (PMUT) and Capacitive
Micromachined Ultrasonic Transducers (CMUT) have seen great developments in recent …

Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties

E Ledesma, I Zamora, J Yanez, A Uranga… - Microsystems & …, 2022 - nature.com
In this work, a single cell capable of monitoring fluid density, viscosity, sound velocity, and
compressibility with a compact and small design is presented. The fluid measurement …

Enhancing AlN PMUTs' acoustic responsivity within a MEMS-on-CMOS process

E Ledesma, I Zamora, A Uranga, F Torres, N Barniol - Sensors, 2021 - mdpi.com
In this paper, guidelines for the optimization of piezoelectrical micromachined ultrasound
transducers (PMUTs) monolithically integrated over a CMOS technology are developed …

Fully integrated pitch-matched AlScN PMUT-on-CMOS array for high resolution Ultrasound Images

E Ledesma, A Uranga, F Torres… - IEEE Sensors …, 2024 - ieeexplore.ieee.org
This article presents a fully integrated pitch-matched piezoelectric micromachined ultrasonic
transducers (PMUTs)-on-CMOS array with high potential in catheter-based ultrasound …

A 0.35 MM2 System on Chip Level Detector Based on An Annular Pmut-On-Cmos Array

E Ledesma, I Zamora, F Torres… - 2023 IEEE 36th …, 2023 - ieeexplore.ieee.org
This paper presents a 0.35 mm 2 multi-element annular piezoelectric micromachined
ultrasonic transducer array monolithically integrated on CMOS (PMUT-on-CMOS) capable of …

Design of a front-end ASIC for a fully integrated ultrasound PMUT array in CMOS

I Zamora - 2022 - ddd.uab.cat
Avui en dia, els avenços en transductors ultrasònics MEMS miniaturitzats requereixen grans
esforços en el disseny dels circuits electrònics d'interfície per tal d'aprofitar el seu menor …