A comprehensive review is presented on the advances achieved in past years on
fundamental and applied materials science of diamond films and engineering to integrate …

Graphene is the strongest material ever studied and can be an efficient substitute for silicon.
This six-volume handbook focuses on fabrication methods, nanostructure and atomic …

This paper presents a packaging technology that employs an electroplated nickel film to
vacuum seal a MEMS structure at the wafer level. The package is fabricated in a low …

With the rapid development of nanoscience and nanotechnology, a wide variety of
nanomaterials have been synthesized and discovered. Revolutionary particles called …

Diamond is a material of interest due to its unique combination of properties, including its
chemical inertness and biocompatibility. Polycrystalline diamond (poly-C) has been used in …

Cantilever type MEMS resonators were fabricated using boron-doped (~ 5 times 10 19 cm-3)
and undoped polycrystalline diamond (poly-C) films that were grown at 600degC or …

In this paper, low-impedance lateral-extensional microresonators are fabricated on a stack
of aluminum nitride (AlN) directly deposited on a polished ultrananocrystalline diamond …

Microelectromechanical systems (MEMS) resonators serve as frequency-selective
components in applications ranging from biology to communications. In this paper, the …

Silicon carbide (SiC) is an excellent candidate for use in next generation RF MEMS devices
such as microfabricated switches, micromechanical resonators, and filters. SiC is …

A new high reliable microelectromechanical radial contour mode disk resonator is
demonstrated with the ability to work at UHF range and high quality factor in both vacuum …