Electron power absorption dynamics in magnetized capacitively coupled radio frequency oxygen discharges

L Wang, DQ Wen, P Hartmann, Z Donko… - Plasma Sources …, 2020 - iopscience.iop.org
The influence of a uniform magnetic field parallel to the electrodes on radio frequency
capacitively coupled oxygen discharges driven at 13.56 MHz at a pressure of 100 mTorr is …

Electron dynamics in planar radio frequency magnetron plasmas: II. Heating and energization mechanisms studied via a 2d3v particle-in-cell/Monte Carlo code

D Eremin, B Berger, D Engel, J Kallähn… - Plasma Sources …, 2023 - iopscience.iop.org
The present work investigates electron transport and heating mechanisms using an (r, z)
particle-in-cell simulation of a typical rf-driven axisymmetric magnetron discharge with a …

Electron dynamics in radio frequency magnetron sputtering argon discharges with a dielectric target

B Zheng, Y Fu, K Wang, T Schuelke… - … Sources Science and …, 2021 - iopscience.iop.org
We demonstrate a self-consistent and complete description of electron dynamics in a typical
electropositive radio frequency magnetron sputtering (RFMS) argon discharge with a …

High-energy ballistic electrons in low-pressure radio-frequency plasmas

Y Fu, B Zheng, DQ Wen, P Zhang… - Plasma Sources …, 2020 - iopscience.iop.org
This work demonstrates the presence of a small number of high-energy ballistic electrons
(HEBEs) that originate from secondary electrons in low-pressure radio-frequency (rf) …

Scale-invariant resonance characteristics in magnetized capacitive radio frequency plasmas

D Yang, H Wang, B Zheng, X Zou, X Wang, Y Fu - Physics of Plasmas, 2023 - pubs.aip.org
Resonance mechanisms have been found to be essential for the generation of high-density
rf plasmas at low pressures, in which electrons can be continuously accelerated through …

Similarity law and frequency scaling in low-pressure capacitive radio frequency plasmas

Y Fu, B Zheng, DQ Wen, P Zhang, QH Fan… - Applied Physics …, 2020 - pubs.aip.org
We verify the similarity law (SL) and show a violation of frequency scaling (f-scaling) in low-
pressure capacitive radio frequency (rf) plasmas via fully kinetic particle-in-cell simulations …

Electron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the µ-mode

D Eremin, D Engel, D Krüger, S Wilczek… - Plasma Sources …, 2023 - iopscience.iop.org
The electron dynamics and the mechanisms of power absorption in radio-frequency (RF)
driven, magnetically enhanced capacitively coupled plasmas at low pressure are …

Generalizing similarity laws for radio-frequency discharge plasmas across nonlinear transition regimes

Y Fu, H Wang, B Zheng, P Zhang, QH Fan, X Wang… - Physical Review …, 2021 - APS
We generalize similarity theory based on the scaling and solution invariance of the
Boltzmann equation, coupled with the Poisson equation, and demonstrate similarity laws for …

[HTML][HTML] Magnetic field induced electron temperature inhomogeneity effects on discharge properties in cylindrical capacitively coupled plasmas

S Dahiya, P Singh, S Das, N Sirse, SK Karkari - Physics Letters A, 2023 - Elsevier
This paper presents the discharge properties of a novel cylindrical Capacitively Coupled
Plasma (CCP) discharge with an axisymmetric magnetic field. It is observed that with an …

Electron dynamics in planar radio frequency magnetron plasmas: III. Comparison of experimental investigations of power absorption dynamics to simulation results

B Berger, D Eremin, M Oberberg, D Engel… - Plasma Sources …, 2023 - iopscience.iop.org
In magnetized capacitively coupled radio-frequency (RF) discharges operated at low
pressure the influence of the magnetic flux density on discharge properties has been studied …