Electron power absorption dynamics in magnetized capacitively coupled radio frequency oxygen discharges
The influence of a uniform magnetic field parallel to the electrodes on radio frequency
capacitively coupled oxygen discharges driven at 13.56 MHz at a pressure of 100 mTorr is …
capacitively coupled oxygen discharges driven at 13.56 MHz at a pressure of 100 mTorr is …
Electron dynamics in planar radio frequency magnetron plasmas: II. Heating and energization mechanisms studied via a 2d3v particle-in-cell/Monte Carlo code
D Eremin, B Berger, D Engel, J Kallähn… - Plasma Sources …, 2023 - iopscience.iop.org
The present work investigates electron transport and heating mechanisms using an (r, z)
particle-in-cell simulation of a typical rf-driven axisymmetric magnetron discharge with a …
particle-in-cell simulation of a typical rf-driven axisymmetric magnetron discharge with a …
Electron dynamics in radio frequency magnetron sputtering argon discharges with a dielectric target
We demonstrate a self-consistent and complete description of electron dynamics in a typical
electropositive radio frequency magnetron sputtering (RFMS) argon discharge with a …
electropositive radio frequency magnetron sputtering (RFMS) argon discharge with a …
High-energy ballistic electrons in low-pressure radio-frequency plasmas
This work demonstrates the presence of a small number of high-energy ballistic electrons
(HEBEs) that originate from secondary electrons in low-pressure radio-frequency (rf) …
(HEBEs) that originate from secondary electrons in low-pressure radio-frequency (rf) …
Scale-invariant resonance characteristics in magnetized capacitive radio frequency plasmas
Resonance mechanisms have been found to be essential for the generation of high-density
rf plasmas at low pressures, in which electrons can be continuously accelerated through …
rf plasmas at low pressures, in which electrons can be continuously accelerated through …
Similarity law and frequency scaling in low-pressure capacitive radio frequency plasmas
We verify the similarity law (SL) and show a violation of frequency scaling (f-scaling) in low-
pressure capacitive radio frequency (rf) plasmas via fully kinetic particle-in-cell simulations …
pressure capacitive radio frequency (rf) plasmas via fully kinetic particle-in-cell simulations …
Electron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the µ-mode
The electron dynamics and the mechanisms of power absorption in radio-frequency (RF)
driven, magnetically enhanced capacitively coupled plasmas at low pressure are …
driven, magnetically enhanced capacitively coupled plasmas at low pressure are …
Generalizing similarity laws for radio-frequency discharge plasmas across nonlinear transition regimes
We generalize similarity theory based on the scaling and solution invariance of the
Boltzmann equation, coupled with the Poisson equation, and demonstrate similarity laws for …
Boltzmann equation, coupled with the Poisson equation, and demonstrate similarity laws for …
[HTML][HTML] Magnetic field induced electron temperature inhomogeneity effects on discharge properties in cylindrical capacitively coupled plasmas
This paper presents the discharge properties of a novel cylindrical Capacitively Coupled
Plasma (CCP) discharge with an axisymmetric magnetic field. It is observed that with an …
Plasma (CCP) discharge with an axisymmetric magnetic field. It is observed that with an …
Electron dynamics in planar radio frequency magnetron plasmas: III. Comparison of experimental investigations of power absorption dynamics to simulation results
B Berger, D Eremin, M Oberberg, D Engel… - Plasma Sources …, 2023 - iopscience.iop.org
In magnetized capacitively coupled radio-frequency (RF) discharges operated at low
pressure the influence of the magnetic flux density on discharge properties has been studied …
pressure the influence of the magnetic flux density on discharge properties has been studied …