Linear and nonlinear dynamics of micro and nano-resonators: Review of recent advances
Micro and nanoelectromechanical systems M/NEMS have been extensively investigated
and exploited in the past few decades for various applications and for probing fundamental …
and exploited in the past few decades for various applications and for probing fundamental …
Development of electrostatic microactuators: 5-year progress in modeling, design, and applications
I Morkvenaite-Vilkonciene, V Bucinskas… - Micromachines, 2022 - mdpi.com
The implementation of electrostatic microactuators is one of the most popular technical
solutions in the field of micropositioning due to their versatility and variety of possible …
solutions in the field of micropositioning due to their versatility and variety of possible …
[HTML][HTML] Multiple internal resonances in MEMS arch resonators
Micromachined shallow arch resonant beams have attracted significant attention thanks to
their rich dynamical behavior, inherent nonlinearities, and the potential to excite various …
their rich dynamical behavior, inherent nonlinearities, and the potential to excite various …
Two-to-one internal resonance of MEMS arch resonators
We investigate experimentally and theoretically the two-to-one internal resonance between
the first two symmetric vibrational modes of a micromachined arch resonator, which is …
the first two symmetric vibrational modes of a micromachined arch resonator, which is …
Theoretical and experimental investigation of two-to-one internal resonance in MEMS arch resonators
We investigate theoretically and experimentally the two-to-one internal resonance in
micromachined arch beams, which are electrothermally tuned and electrostatically driven …
micromachined arch beams, which are electrothermally tuned and electrostatically driven …
On weakly coupled resonant MEMS transducers operating in the modal overlap regime
Miniaturized physical transducers based on weakly coupled resonators have previously
demonstrated the twin benefits of high parametric sensitivity and the first-order common …
demonstrated the twin benefits of high parametric sensitivity and the first-order common …
Towards a high bias voltage MEMS filter using electrostatic levitation
M Pallay, RN Miles, S Towfighian - Mechanical Systems and Signal …, 2021 - Elsevier
Traditional MEMS filters use a comb drive structure that suffers from the pull-in instability,
which places a significant limitation on the achievable signal-to-noise ratio of the sensor …
which places a significant limitation on the achievable signal-to-noise ratio of the sensor …
Dynamics of V-shaped electrothermal MEMS-based resonators
N Alcheikh, HM Ouakad… - Journal of …, 2020 - ieeexplore.ieee.org
In this work, we study experimentally, analytically, and numerically the dynamics of
electrothermally actuated micro-electro-mechanical V-shaped micro-beam resonators. Upon …
electrothermally actuated micro-electro-mechanical V-shaped micro-beam resonators. Upon …
Graphene foam resonators: Fabrication and characterization
Three-dimensional graphene foams (GFs) benefit from a large surface area and unique
physical properties. We present here the first-ever miniaturized GF-based resonators. We …
physical properties. We present here the first-ever miniaturized GF-based resonators. We …
Thermoelastic damping suppression method of micro-beam resonators with basically constant resonant frequency
R Cheng, P Song, J Chen, Q Huang… - Journal of Thermal …, 2022 - Taylor & Francis
High-Q micro-beam resonators have been widely applied in communication fields such as
narrowband filters, but thermoelastic damping restricts the further improvement of quality …
narrowband filters, but thermoelastic damping restricts the further improvement of quality …