50 Years of Reactive Ion Etching in Microelectronics
S Voronin, C Vallée - IEEE Transactions on Materials for …, 2024 - ieeexplore.ieee.org
In this short review, the evolution of plasma etching technologies used in microelectronics
fabrication since the discovery of the reactive ion etching process 50 years ago is explored …
fabrication since the discovery of the reactive ion etching process 50 years ago is explored …