Due to various difficult-to-machine materials and increasingly severe machining conditions,
more and more attention has been paid to the physical vapor deposition (PVD) technology …

To obtain both high ionization and high deposition rate, a modified global model for a
continuous high-power DC magnetron sputtering (C-HPMS) is established by considering …

Ionisation zones, or spokes to which the discharge self-organises during a high-power
impulse magnetron sputtering (HiPIMS) pulse, are a recently investigated phenomenon; …

The effect on the ion energy distribution function (IEDF) of plasma produced during a high-
power impulse magnetron sputtering (HiPIMS) discharge as the pulse conditions are varied …

This work reports a systematic review of the studies of magnetron sputtering (MS)
discharges and their utilities for the deposition of transparent coating oxide thin films like …

Ionisation zones, or spokes to which the discharge self-organises during the HiPIMS pulse is
a recently investigated phenomenon, however adequately describing or representing these …