Low-overhead multi-patterning design rule check

SI Chase, Z Dai, D Liu, M Su - US Patent 8,677,297, 2014 - Google Patents
Creating design rule clean layouts for digital circuit designs can be facilitated by the use of
standard cell layouts as building blocks, and placement and routing tools that are extended …

Low-overhead multi-patterning design rule check

S Chase, Z Dai, D Liu, M Su - US Patent 8,843,867, 2014 - Google Patents
Roughly described, a system enables quick and accurate depiction to a user of multi-
patterning layout violations so that they may be corrected manually and in real time, and …

High performance design rule checking technique

Z Dai, D Liu, M Su - US Patent 9,009,632, 2015 - Google Patents
Roughly described, a design rule data set is developed offline from the design rules of a
target fabrication process. A design rule checking method involves traversing the corners of …

Method of preparing a pattern, method of forming a mask set, device manufacturing method and computer program

TB Chiou, M Dusa, ACH Chen - US Patent 8,945,800, 2015 - Google Patents
In a multiple patterning techniques, where two or more expo Sures are used to form a single
layer of a device, the splitting of features in a single layer between the multiple exposures is …

Real time DRC assistance for manual layout editing

J Bendicksen, R Bishop, Z Dai, J Hapli, D Liu… - US Patent …, 2014 - Google Patents
Roughly described, while manually dragging shapes during IC layout editing, editing
operations determine which edges of which shapes are moving at what speed ratios. Based …

Nanometer VLSI design-manufacturing interface for large scale integration

JS Yang - 2011 - repositories.lib.utexas.edu
Abstract As nanometer Very Large Scale Integration (VLSI) demands more transistor density
to fabricate multi-cores and memory blocks in a limited die size, many researches have been …

Exploration of VLSI CAD researches for early design rule evaluation

CH Park, DZ Pan, K Lucas - 16th Asia and South Pacific …, 2011 - ieeexplore.ieee.org
Design rule has been a primary metric to link design and technology, and is likely to be
considered as IC manufacturer's role for the generation due to the empirical and …

Double Patterning Lithography (DPL)-compliant layout construction (DCLC) with area-stitch usage tradeoff

D Pal, A Pramanik, P Dasgupta… - 2016 20th International …, 2016 - ieeexplore.ieee.org
A layout decomposition in Double Patterning Lithography (DPL) is considered to be
potential for processing nodes at or below 32 nm. In this method, two features are assigned …

[PDF][PDF] A new approach in design for manufacturing for nanoscale VLSI circuits

D Pal - 2016 - 20.198.91.3
Manufacturing of VLSI chips in the sub-wavelength technology using the conventional
lithography has become extremely challenging. A major reason for this is the difficulty to …