Emerging materials for microelectromechanical systems at elevated temperatures
JA Krogstad, C Keimel, KJ Hemker - Journal of Materials Research, 2014 - cambridge.org
Extension of microelectromechanical systems (MEMS) into more extreme operating
conditions will require a wider range of material properties than are currently available in …
conditions will require a wider range of material properties than are currently available in …
Simultaneous dual-functioning InGaN/GaN multiple-quantum-well diode for transferrable optoelectronics
Z Shi, J Yuan, S Zhang, Y Liu, Y Wang - Optical Materials, 2017 - Elsevier
We propose a wafer-level procedure for the fabrication of 1.5-mm-diameter dual functioning
InGaN/GaN multiple-quantum-well (MQW) diodes on a GaN-on-silicon platform for …
InGaN/GaN multiple-quantum-well (MQW) diodes on a GaN-on-silicon platform for …
Suspended p–n junction InGaN/GaN multiple-quantum-well device with selectable functionality
We demonstrate optoelectronic devices implemented on suspended pn junction InGaN/GaN
multiple quantum wells (MQWs) for the further monolithic integration of an optical source, a …
multiple quantum wells (MQWs) for the further monolithic integration of an optical source, a …
Light induced synaptic transistor with dual operation modes
Y Li, Y Yang, X Gao, J Yuan, G Zhu… - IEEE Electron …, 2016 - ieeexplore.ieee.org
We propose and fabricate a light induced transistor using a combination of two multiple-
quantum-well diodes (MQWDs) with a common n-electrode as the base. Both silicon …
quantum-well diodes (MQWDs) with a common n-electrode as the base. Both silicon …
Fabrication of GaN cantilever on GaN substrate by photo-electrochemical etching
T Yamada, Y Ando, H Watanabe… - Applied Physics …, 2021 - iopscience.iop.org
Photo-electrochemical (PEC) etching is a promising technique for fabricating GaN
microelectromechanical systems devices. In this study, we demonstrate the fabrication of …
microelectromechanical systems devices. In this study, we demonstrate the fabrication of …
Spatial audio acquisition using a dual-functioning MQW-diode with a three-stage amplifier circuit
A multiple-quantum-well diode (MQW-diode) can function as a light-emitting diode or a
photodiode. In particular, when appropriately biased, this dual-functioning device can …
photodiode. In particular, when appropriately biased, this dual-functioning device can …
Free-standing GaN grating couplers and rib waveguide for planar photonics at telecommunication wavelength
Q Liu, W Wang - Optics & Laser Technology, 2018 - Elsevier
Abstract Gallium Nitride (GaN) free-standing planar photonic device at telecommunication
wavelength based on GaN-on-silicon platform was presented. The free-standing structure …
wavelength based on GaN-on-silicon platform was presented. The free-standing structure …
Circular GaN membrane gratings
This letter presents the fabrication and characterization of freestanding circular GaN gratings
on a GaN-on-silicon platform. Optical modes propagate within the freestanding GaN …
on a GaN-on-silicon platform. Optical modes propagate within the freestanding GaN …
Residual stress distribution and deflection analysis of very thin GaN membrane supported devices
This paper presents the deflection analysis and stress distribution in GaN membranes
supported devices. The influence of metallization thickness and type on the deflection and …
supported devices. The influence of metallization thickness and type on the deflection and …
Design and fabrication of GaN crystal ultra-small lateral comb-drive actuators
T Tanae, H Sameshima, K Hane - … of Vacuum Science & Technology B, 2012 - pubs.aip.org
Ultra-small electromechanical comb-drive actuators made of GaN crystal were studied in
order to apply them to optical micro-electromechanical systems. Using GaN crystals grown …
order to apply them to optical micro-electromechanical systems. Using GaN crystals grown …