Microcantilevers are at the heart of atomic force microscopy (AFM) and play a significant role
in AFM‐based techniques. Recent advancements in multifrequency AFM require the …

In this study, we investigate the performance of two piezoresistive micro-electro-mechanical
system (MEMS)-based silicon cantilever sensors for measuring target analytes (ie, ultrafine …

An electrothermal piezoresistive cantilever (EPC) sensor is a low-cost MEMS resonance
sensor that provides self-actuating and self-sensing capabilities. In the platform, which is of …

In this paper, a polyimide (PI)/Si/SiO2-based piezoresistive microcantilever biosensor was
developed to achieve a trace level detection for aflatoxin B1. To take advantage of both the …

This study presents a measurement approach suitable for the simultaneous determination of
both the mass mp and magnetic moment µ p of magnetic particles deposited on a micro …

We addressed the coating 5 mm-long cantilever microprobes with a viscoelastic material,
which was intended to considerably extend the range of the traverse speed during the …

The advancement of dynamic and multifrequency atomic force microscopy (AFM)
necessitates leveraging the frequency response of cantilevers when it is in contact with the …

This work shows a differential rotational thermal piezoresistive resonator (DR-TPR) design,
fabrication, and characterization. The resonator uses silicon on insulator (SOI) …

Liquid-borne particles sampling and cantilever-based mass detection are widely applied in
many industrial and scientific fields eg, in the detection of physical, chemical, and biological …

A coating to increase the maximum probing speed of tactile cantilever sensors by increasing
their damping is proposed. A corresponding deposition process is presented and first tests …