In the past decade, micro-electromechanical systems (MEMS)-based thermoelectric infrared
(IR) sensors have received considerable attention because of the advances in …

We propose a mid-infrared device based on thermocouple optical antennas for light sensing
and energy harvesting applications. We numerically demonstrate that antennas are able to …

Thermoelectric nanoantennas have been extensively investigated due to their ability to
directly convert infrared (IR) radiation into direct current without an additional rectification …

Infrared detection technology has extensive and important applications in both military and
civilian fields. Due to the advantages including no refrigeration, wide spectral response …

A stacked double-layer (SDL) thermopile-based infrared sensor, which comprised of 96
thermocouples on a suspended membrane, has been designed and fabricated with a CMOS …

In this paper, the design, fabrication, and testing of a CMOS compatible mid-infrared (mid-IR)
thermopile sensor comprising a stacked double layer thermopile and an interferometric …

This paper presents the design, fabrication and experimental results of a front-etched CMOS
compatible micromachined thermopile IR detector. The N-polysilicon/Al thermocouples were …

A CMOS-MEMS polysilicon/metal thermopile with low thermal conductance and a high
emissivity in 8-14 μm is presented in this letter. Instead of a traditional aluminum layer with a …

This study demonstrates a fully quantitative characterization of a highly sensitive CMOS–
MEMS polysilicon/titanium thermopile infrared sensor by using the simulations of non …

In this work, a thermopile-based MEMS IR sensor is reported. In the device, a double-layer
thermocouple strip structure and thermal-conductive-electrical-isolated structures are …