Origins and characterization techniques of stress in SiC crystals: A review

J Tian, X Xie, L Zhao, X Wang, X Chen, X Yang… - Progress in Crystal …, 2024 - Elsevier
Silicon carbide (SiC) is a promising semiconductor material which attracts huge attention
due to its wide bandgap, high thermal conductivity and great potential for electronic …

Deformation and removal mechanism of single crystal gallium nitride in nanoscratching

S Tan, Y Wang, H Huang, Y Wu, H Huang - Ceramics International, 2022 - Elsevier
Understanding the deformation mechanism of a brittle material under mechanical loading is
of value for unveiling the material removal in an abrasive machining process. In this work …

Shape modulation due to sub-surface damage difference on N-type 4H–SiC wafer during lapping and polishing

F Guo, C Shao, X Chen, X Xie, X Yang, X Hu… - Materials Science in …, 2022 - Elsevier
The technology enhancement of obtaining 4H–SiC wafers with a concave Si face shape has
improved the performance of GaN-on-SiC. For manufacturers, the wafer shape has a …

Research Progress of Dislocations in SiC Single Crystal.

Z Jiaxin, P Yan, C Xiufang, XIE Xuejian… - Journal of Synthetic …, 2022 - search.ebscohost.com
As the representative of the third generation semiconductor materials, SiC has excellent
physical and chemical properties. With the development of materials and applications, SiC …

Effect of basal plane bending on the atomic step morphology of the 4H–SiC substrate surface

C Shao, F Guo, X Chen, X Li, W Yu, X Yang, X Xie… - Vacuum, 2023 - Elsevier
The atomic step morphology of the SiC (0001) surface is determined by the crystal structure
of SiC and reflects the real crystal morphology of the SiC substrate surface. The atomic step …

Effect of dislocation defects on the nano-scratching process of 4H–SiC

Y Wang, H Ding, N Wang, Y Huang, Y Yu, H Huang… - Wear, 2024 - Elsevier
To investigate the influence of defects on the damage mechanism of 4H–SiC, this study
primarily conducted molecular dynamics simulations of a single diamond abrasive …

Synchrotron X-ray topography studies of dislocation behavior during early stages of PVT growth of 4H-SiC crystals

T Ailihumaer, H Peng, Y Liu… - Journal of Electronic …, 2021 - Springer
With the increasing attention of 4H-silicon carbide (4H-SiC) crystals in the applications of
high-power electronics, it has become necessary to further improve the development of the …

Surface relaxation and photoelectric absorption effects on synchrotron X-ray topographic images of dislocations lying on the basal plane in off-axis 4H-SiC crystals

T Ailihumaer, H Peng, F Fujie… - Materials Science and …, 2021 - Elsevier
A more sophisticated simulation model is developed based on the principle of ray-tracing to
simulate the grazing-incidence synchrotron X-ray topographic contrast of dislocations lying …

Three-dimensional curving of crystal planes in wide bandgap semiconductor wafers visualized using a laboratory X-ray diffractometer

Y Yao, K Sato, Y Sugawara, N Okada… - Journal of Crystal …, 2022 - Elsevier
The curving of crystal planes (CCP) in wide bandgap semiconductor wafers, caused by
thermal stress during crystal growth or wafer planarization processes, poses serious …

Microstructure analysis of GaN epitaxial layers during ion implantation using synchrotron X-ray topography

Y Liu, H Peng, Z Chen, T Ailihumaer, Q Cheng… - ECS …, 2021 - iopscience.iop.org
A study on characterization of microstructures in ammonothermal grown GaN wafers at
different stages of device fabrication is conducted using synchrotron monochromatic beam X …