Polymer-derived ceramic thin-film thermocouples for high temperature measurements

Q Chen, P Zhang, K Liu, P Xu, H Wei, Z Hai, D Wu… - Ceramics …, 2023 - Elsevier
Thin-film thermocouples are used as temperature detection components in aircraft engines.
However, the preparation of traditional thin-film thermocouples is complex, and their high …

Effect of nitrogen partial pressure on the piezoresistivity of magnetron sputtered ITO thin films at high temperatures

Z Liu, J Liang, H Zhou, H Sun, W Lu, B Wang, Q Li… - Applied Surface …, 2023 - Elsevier
Various ITO thin films were deposited by RF magnetron sputtering with different nitrogen
partial pressure (NPP) of 10%∼ 40% to quantitatively modify their high temperatures …

High temperature electrical insulation and adhesion of nanocrystalline YSZ/Al2O3 composite film for thin-film thermocouples on Ni-based superalloy substrates

Y Liu, H Jiang, X Zhao, X Deng, W Zhang - Applied Surface Science, 2022 - Elsevier
Electrical insulation and adhesion are two vital aspects for the integrated thin film sensors
with Ni-based superalloy substrates. In this paper, nanocrystalline yttria-stabilized …

Thin‐Film Thermocouples Based on the System In2O3–SnO2

X Chen, OJ Gregory, M Amani - Journal of the American …, 2011 - Wiley Online Library
Ceramic thermocouples are being developed to replace noble‐metal thermocouples that
are unable to withstand the harsh environments inside the hot sections of turbine engines …

Annealing effects in ITO based ceramic thin film thermocouples

X Zhao, H Li, K Yang, S Jiang, H Jiang… - Journal of Alloys and …, 2017 - Elsevier
Nitrogen doped indium oxide (InON) and indium tin oxide (ITON) thin films were fabricated
with reactive sputtering in nitrogen-rich plasmas for high temperature thermocouples …

Stability enhancement of the nitrogen-doped ITO thin films at high temperatures using two-step mixed atmosphere annealing technique

Z Liu, J Liang, H Zhou, W Lu, J Li, B Wang, Q Li… - Applied Surface …, 2022 - Elsevier
Two-step mixed atmosphere annealing was developed to enhance the stability of the
nitrogen-doped ITO (ITON) thin films at high temperatures. The ITON thin films were first …

Effect of AlN/Al2O3 Thin-Film Protective Layer on the High-Temperature Performance of ITO Thin-Film Strain Gauge

S Li, L Zhang, H Xie, X Yao, Z Hao… - IEEE Sensors …, 2023 - ieeexplore.ieee.org
When an ITO thin-film strain gauge is applied on turbine engine blades, a protective layer
must be included to prevent the oxidation of the ITO thin-film sensitive material. In this study …

Piezoresistive failure behaviors and mechanisms of the ITO thin films at high temperatures

Z Liu, J Liang, B Wang, Z Hou, H Wang, H Sun, W Lu… - Vacuum, 2023 - Elsevier
ITO is drawing enormous attention in fabrication of thin film strain gauges (TFSGs) due to its
excellent oxidation resistance, high melting point and great piezoresistivity. However, the …

Characteristics of zirconium-doped indium tin oxide thin films deposited by magnetron sputtering

B Zhang, X Dong, X Xu, P Zhao, J Wu - Solar Energy Materials and Solar …, 2008 - Elsevier
ITO: Zr thin films were deposited on glass substrates by co-sputtering with an ITO target and
a zirconium target. The experiment parameters such as substrate temperature and oxygen …

Effect of nitrogen partial pressure on the TCR of magnetron sputtered indium tin oxide thin films at high temperatures

Z Liu, J Liang, H Zhou, J Li, M Yang, S Cao, J Xu - Ceramics International, 2022 - Elsevier
Indium tin oxide (ITO) is a promising sensitive material for ultra-high temperature thin-film
sensors (UTTSs) applied in thermal and mechanical parameters test in hot section parts …