Recent advances in the understanding of high-k dielectric materials deposited by atomic layer deposition for dynamic random-access memory capacitor applications
W Jeon - Journal of Materials Research, 2020 - cambridge.org
Capacitors represent the largest obstacle to dynamic random-access memory (DRAM)
technology evolution because the capacitor properties govern the overall operational …
technology evolution because the capacitor properties govern the overall operational …
Physical Mechanisms behind the Field‐Cycling Behavior of HfO2‐Based Ferroelectric Capacitors
M Pešić, FPG Fengler, L Larcher… - Advanced Functional …, 2016 - Wiley Online Library
Novel hafnium oxide (HfO2)‐based ferroelectrics reveal full scalability and complementary
metal oxide semiconductor integratability compared to perovskite‐based ferroelectrics that …
metal oxide semiconductor integratability compared to perovskite‐based ferroelectrics that …
[HTML][HTML] Advancing in-situ resource utilization for earth and space applications through plasma CO2 catalysis
Catalysis has optimized and improved production rates in many industrial processes.
Conventional catalysis plays a key role in the mass-production of otherwise difficult to obtain …
Conventional catalysis plays a key role in the mass-production of otherwise difficult to obtain …
Enhanced Ferroelectric Properties in Hf0.5Zr0.5O2 Films Using a HfO0.61N0.72 Interfacial Layer
BY Kim, HW Park, SD Hyun, YB Lee… - Advanced Electronic …, 2022 - Wiley Online Library
Fluorite structured ferroelectrics, such as (Hf, Zr) O2, attract much interest due to their
scalability and compatibility with complementary metal‐oxide semiconductors, which make …
scalability and compatibility with complementary metal‐oxide semiconductors, which make …
Role of Oxygen Source on Buried Interfaces in Atomic-Layer-Deposited Ferroelectric Hafnia–Zirconia Thin Films
HA Hsain, Y Lee, S Lancaster… - … Applied Materials & …, 2022 - ACS Publications
Hafnia–zirconia (HfO2–ZrO2) solid solution thin films have emerged as viable candidates for
electronic applications due to their compatibility with Si technology and demonstrated …
electronic applications due to their compatibility with Si technology and demonstrated …
Highly Uniform Resistive Switching in HfO2 Films Embedded with Ordered Metal Nanoisland Arrays
Memristors enter a critical developmental stage where emerging large‐scale integration
methods face major challenges with severe switching instabilities in the oxide layer. Here …
methods face major challenges with severe switching instabilities in the oxide layer. Here …
Effect of acceptor doping on phase transitions of HfO2 thin films for energy-related applications
Abstract Fluorite structured HfO 2 or ZrO 2 thin films have been intensively studied for
memory-and energy-related applications since their ferroelectricity was first reported in …
memory-and energy-related applications since their ferroelectricity was first reported in …
Top Electrode Engineering for Freedom in Design and Implementation of Ferroelectric Tunnel Junctions Based on Hf1–xZrxO2
R Athle, AEO Persson, A Troian… - ACS Applied Electronic …, 2022 - ACS Publications
Ferroelectric tunnel junctions (FTJs) based on ultrathin HfO2 have great potential as a fast
and energy-efficient memory technology compatible with complementary metal oxide …
and energy-efficient memory technology compatible with complementary metal oxide …
Effect of Al2O3 layer thickness on leakage current and dielectric properties of atomic layer deposited Al2O3/TiO2/Al2O3 nano-stack
In order to develop an alternate high-k and low-loss dielectric material for high density
energy storage and gate oxide applications and to address the leakage current issues in …
energy storage and gate oxide applications and to address the leakage current issues in …
A new approach to achieving strong ferroelectric properties in TiN/Hf0. 5Zr0. 5O2/TiN devices
In this paper, we propose a method to improve the performance of TiN/Hf 0.5 Zr 0.5 O 2
(HZO)/TiN Nano-capacitors used in memory devices. Instead of direct fabrication of the …
(HZO)/TiN Nano-capacitors used in memory devices. Instead of direct fabrication of the …