Piezoelectric MEMS based acoustic sensors: A review
This paper discusses piezoelectric acoustic devices based on widely used piezoelectric
materials. Commonly used piezoelectric thin film deposition techniques and the influence of …
materials. Commonly used piezoelectric thin film deposition techniques and the influence of …
MEMS acoustic emission sensors
D Ozevin - Applied Sciences, 2020 - mdpi.com
This paper presents a review of state-of-the-art micro-electro-mechanical-systems (MEMS)
acoustic emission (AE) sensors. MEMS AE sensors are designed to detect active defects in …
acoustic emission (AE) sensors. MEMS AE sensors are designed to detect active defects in …
Effect of Ni doping on structure, morphology and opto-transport properties of spray pyrolised ZnO nano-fiber
MY Ali, MKR Khan, AMMT Karim, MM Rahman… - Heliyon, 2020 - cell.com
Nano-fiber structure of ZnO and Ni doped ZnO (Ni: ZnO) transparent thin films have been
deposited on glass substrate at 350° C at an ambient atmosphere via spray pyrolysis …
deposited on glass substrate at 350° C at an ambient atmosphere via spray pyrolysis …
MEMS-based piezoresistive and capacitive microphones: A review on materials and methods
Microelectromechanical systems (MEMS)-based piezoresistive and capacitive microphones
have gained significant attention due to their miniaturization, high performance, and diverse …
have gained significant attention due to their miniaturization, high performance, and diverse …
Multi-frequency MEMS acoustic emission sensor
In this paper, a multi-frequency MEMS acoustic emission (AE) sensor is designed,
characterized, and tested. The sensor includes sixteen individual resonators tuned in the …
characterized, and tested. The sensor includes sixteen individual resonators tuned in the …
MEMS vibrometer for structural health monitoring using guided ultrasonic waves
JN Haus, W Lang, T Roloff, L Rittmeier, S Bornemann… - Sensors, 2022 - mdpi.com
Structural health monitoring of lightweight constructions made of composite materials can be
performed using guided ultrasonic waves. If modern fiber metal laminates are used, this …
performed using guided ultrasonic waves. If modern fiber metal laminates are used, this …
A critical review of copper electroless deposition on glass substrates for microsystems packaging applications
This article reviews the state-of-the-art electroless copper deposition on glass substrates
and the associated challenges. The well-known issue of poor adhesion of electroless …
and the associated challenges. The well-known issue of poor adhesion of electroless …
[HTML][HTML] Optimization and fabrication of MEMS based piezoelectric acoustic sensor for wide frequency range and high SPL acoustic application
This paper reports finite element model (FEM) simulation and fabrication of a square shaped
diaphragm along with microtunnel for MEMS acoustic sensor which can be used for …
diaphragm along with microtunnel for MEMS acoustic sensor which can be used for …
Fabrication of graphene–ZnO heterostructure-based flexible and thin platform-based UV detector
This work presents the performance evaluation of Graphene/ZnO Schottky junctions grown
on flexible indium tin oxide (ITO)-coated polyethylene terephthalate (PET) substrates. The …
on flexible indium tin oxide (ITO)-coated polyethylene terephthalate (PET) substrates. The …
Development and characterization of ZnO thin film for piezoelectric applications
This paper reports a structural study of the ZnO thin film deposited on p-type silicon substrate
using radio frequency (RF) sputtering technique. The structural study of the deposited ZnO …
using radio frequency (RF) sputtering technique. The structural study of the deposited ZnO …