Multi-wavelength VCSEL array and method of fabrication
AP Pissis, E Zibik - US Patent 11,876,350, 2024 - Google Patents
A vertical cavity surface emitting laser (VCSEL) array is fabricated to produce multiple
wavelengths. A first distributed Bragg reflector (DBR) is formed on a substrate, and an …
wavelengths. A first distributed Bragg reflector (DBR) is formed on a substrate, and an …