Hydrogen detection near surfaces and shallow interfaces with resonant nuclear reaction analysis
M Wilde, K Fukutani - Surface science reports, 2014 - Elsevier
This review introduces hydrogen depth profiling by nuclear reaction analysis (NRA) via the
resonant 1 H (15 N, αγ) 12 C reaction as a versatile method for the highly depth-resolved …
resonant 1 H (15 N, αγ) 12 C reaction as a versatile method for the highly depth-resolved …
Hydrogen interaction with clean and modified silicon surfaces
K Oura, VG Lifshits, AA Saranin, AV Zotov… - Surface Science …, 1999 - Elsevier
The present report deals with the main aspects of the interaction of hydrogen with the
atomically clean crystalline silicon surfaces and submonolayer metal/silicon interfaces. After …
atomically clean crystalline silicon surfaces and submonolayer metal/silicon interfaces. After …
Silicon heterojunction back contact solar cells by laser patterning
H Wu, F Ye, M Yang, F Luo, X Tang, Q Tang, H Qiu… - Nature, 2024 - nature.com
Back contact silicon solar cells, valued for their aesthetic appeal by removing grid lines on
the sunny side, find applications in buildings, vehicles and aircrafts, enabling self-power …
the sunny side, find applications in buildings, vehicles and aircrafts, enabling self-power …
Ultrathin (< 4 nm) SiO2 and Si–O–N gate dielectric layers for silicon microelectronics: Understanding the processing, structure, and physical and electrical limits
The outstanding properties of SiO 2, which include high resistivity, excellent dielectric
strength, a large band gap, a high melting point, and a native, low defect density interface …
strength, a large band gap, a high melting point, and a native, low defect density interface …
Towards the fabrication of phosphorus qubits for a silicon quantum computer
The quest to build a quantum computer has been inspired by the recognition of the
formidable computational power such a device could offer. In particular silicon-based …
formidable computational power such a device could offer. In particular silicon-based …
Growth and characterization of ultrathin nitrided silicon oxide films
EP Gusev, HC Lu, EL Garfunkel… - IBM journal of …, 1999 - ieeexplore.ieee.org
This paper reviews recent progress in understanding microstructural and growth-
mechanistic aspects of ultrathin (< 4 nm) oxynitride films for gate dielectric applications …
mechanistic aspects of ultrathin (< 4 nm) oxynitride films for gate dielectric applications …
Surface morphology during multilayer epitaxial growth of Ge (001)
The surface morphology of Ge (001) films grown by molecular beam epitaxy on a Ge (001)
substrate is measured using scanning tunneling microscopy. Growth mounds are observed …
substrate is measured using scanning tunneling microscopy. Growth mounds are observed …
Model on transport phenomena and epitaxial growth of silicon thin film in SiHCl3 H2 system under atmospheric pressure
H Habuka, T Nagoya, M Mayusumi, M Katayama… - Journal of Crystal …, 1996 - Elsevier
A transport and epitaxy model to describe silicon epitaxial film growth in a SiHCl3 H2
system under atmospheric pressure is developed by numerical calculations and comparison …
system under atmospheric pressure is developed by numerical calculations and comparison …
Hydrogen passivation of silicon surfaces: A classical molecular-dynamics study
U Hansen, P Vogl - Physical Review B, 1998 - APS
We present a computationally efficient classical many-body potential that is capable of
predicting the energetics of bulk silicon, silicon surfaces, and the interaction of hydrogen …
predicting the energetics of bulk silicon, silicon surfaces, and the interaction of hydrogen …
The surfactant effect in semiconductor thin-film growth
D Kandel, E Kaxiras - Solid State Physics, 2000 - Elsevier
Progress in the fields of electronic and optical devices relies on the ability of the
semiconductor industry to fabricate components of ever-increasing complexity and …
semiconductor industry to fabricate components of ever-increasing complexity and …