Thermally-induced microstructure and property alteration of nano-multilayer (NML) coatings
are of principal importance for industrial applications. The phenomenon of surface outflow of …

The properties and thermal stability of thin films and nano-multilayers (NMLs) are generally
governed by the in-depth stress (strain) gradients rather than the average stress state. The …

The continuing trend in heterogeneous integration (ie, miniaturization and diversification of
devices and components) requires a fundamental understanding of the phase stability and …

Abstract Low-defect, high-efficiency, and high-precision copper (Cu) removal is critical for
the development of high-density 3D-integration technology for integrated circuits (ICs) …

Surface templating of nano-multilayers is a promising step for the advanced industrial
application of these nanomaterials. In the present work, the effect of focused ion beam …

In this study, we have investigated the feasibility of localized, focused ion beam (FIB)-
stimulated Cu outflow in Cu/W nanomultilayers (NMLs) for manufacturing of heterogeneous …