With the increasing interest in dry etching of silicon nitride, utilization of hydrogen-contained
fluorocarbon plasma has become one of the most important processes in manufacturing …

We have deposited diamond-like carbon (DLC) films on glass and Si substrates with direct
ion beam deposition technique and investigated the effect of N 2 doping on their structural …

Abstract DLC: Si and DLC: N (diamond-like carbons doped with Si or N) functional layers in
different configurations are deposited on polyurethane (PU) for bioengineering applications …

In this study, ZrO 2 coatings with different thicknesses were grown by the electron beam
evaporation technique. The crystalline structure was studied by XRD analysis which …

The paper proposed a method to improve the anti-oxidation performance of carbon fibers
(CF) at high temperature environment by coating silicon dioxide (SiO2) and silicon carbide …

The water resistance and photo-efficiency of K 2 SiF 6: Mn 4+ phosphor (KSF) was improved
without sacrificing the optical properties through plasma treatment …

Control of the plasma densities and energies of the principal plasma species is crucial to
induce modification of the plasma reactivity, chemistry, and film properties. This work …

In this paper, the surface properties and selected mechanical and biological properties of
various multi-layer systems based on diamond-like carbon structure deposited on low …

We have deposited hydrogenated, silicon/nitrogen-incorporated diamond-like carbon (Si–N-
DLC) films by plasma-enhanced chemical vapor deposition using hexamethyldisilazane …

Narrow‐band red‐emitting fluoride phosphors with Mn4+‐doped are used as WLED
backlight display source with its unique advantages. Its synthesis involving HF and its …