2 Overview of Acoustic-Wave Microsensors Page 1 2 Overview of Acoustic-Wave Microsensors
Vittorio Ferrari1 and Ralf Lucklum2 1Dipartimento di Elettronica per l’Automazione, Università di …

A technique for contactless electromagnetic interrogation of AT-cut quartz piezoelectric
resonator sensors is proposed based on a primary coil electromagnetically air-coupled to a …

As the typical surface separations in Micro Electro-Mechanical Systems (MEMS) are
reduced to below one micrometer, detailed knowledge of the interaction forces down to this …

In this paper, a novel quartz crystal capacitive sensor, which consists of a uniplanar
scattering-field capacitance and a piezoelectric quartz crystal resonator, was proposed for …

A technique for contactless readout of AT-cut quartz resonator sensors is proposed and
validated. The technique is based on the separation in time of the excitation and detection …

A technique for contactless interrogation of quartz resonator sensors is here proposed and
validated. The technique is based on the excitation of the fundamental thickness shear …

As the typical surface separations in Micro Electro-Mechanical Systems (MEMS) are
reduced to below one micrometer, detailed knowledge of the interaction forces down to this …

En el presente trabajo se expone el estado del arte de la exploración sin contacto de un
cristal de cuarzo y de las microbalanzas multicanal de cristal de cuarzo, realizando una …