Microelectromechanical systems (MEMS) represents a technology that integrates
miniaturized mechanical and electromechanical components (ie, sensors and actuators) that …

Thin films at the micrometer and submicrometer scales exhibit mechanical properties that
are different than those of bulk polycrystals. Industrial application of these materials requires …

Micromachining and micro-electromechanical system (MEMS) technologies can be used to
produce complex structures, devices and systems on the scale of micrometers. Initially …

Nanotechnology, science, and engineering spearhead the 21st century revolution that is
leading to fundamental breakthroughs in the way materials, devices, and systems are …

This paper presents an exercise in comparing the performance of microelectromechanical
systems (MEMS) actuators and sensors as a function of operating principle. Data have been …

A study has been made to discern the mechanisms for the delayed failure of 2-μm thick
structural films of n+-type, polycrystalline silicon under high-cycle fatigue loading conditions …

Over the last few years, considerable effort has gone into the study of the failure
mechanisms and reliability of micro-electromechanical systems (MEMS). Although still very …

It is challenging at best to find a resource that provides the breadth of information necessary
to develop a successful micro electro mechanical system (MEMS) design. Micro Electro …

When subjected to alternating stresses, most materials degrade, eg, suffer premature failure,
due to a phenomenon known as fatigue. It is generally accepted that in brittle materials, such …

Microelectromechanical systems (MEMS) technologies are evolving at a rapid rate with
increasing activity in the design, fabrication, and commercialization of a wide variety of …