Over the past several decades, the technology of micro-electromechanical system (MEMS)
has advanced. A clear need of miniaturization and integration of electronics components …

In this paper, we analyze possible sources of dissipation in aluminium nitride (AlN) contour
mode resonators for three different resonance frequency devices (fr)(220 MHz, 370 MHz …

Formation of allowed and stopped frequency bands of elastic wave propagation in the
periodic media, also known as phononic crystal (PnC), recently has attracted great attention …

This work describes the implementation of acoustic metamaterials (AMs) made of a forest of
rods at the sides of a suspended aluminum scandium nitride (AlScN) contour-mode …

This paper investigates the dependence of the quality factor (Q) of AlN contour mode
resonators (CMRs) on the characteristics of the inactive regions located between the main …

This work presents the development of a novel process flow for the fabrication of Lithium
niobate Lamb wave resonator that allows full control of the shape and size of the released …

Energy leakage via anchors in substrate plates impairs the quality factor (Q) in
microelectromechanical system (MEMS) resonators. Most phononic crystals (PnCs) require …

Anchor loss is usually the most significant energy loss factor in Micro-Electro-Mechanical
Systems (MEMS) resonators, which seriously hinders the application of MEMS resonators in …

This article reports on the first demonstration of a high resolution (~ 1.9 nW/Hz 1/2 measured
in 200 Hz bandwidth) and fast (~ 5.3 ms) uncooled Infrared (IR) detector based on a high …

Through the use of a laser Doppler vibrometer, it is shown that a 31% variation in quality
factor can occur due to the effect of undercutting of the device layers outside of the anchors …