A brief review of actuation at the micro-scale using electrostatics, electromagnetics and piezoelectric ultrasonics

DKC Liu, J Friend, L Yeo - Acoustical Science and Technology, 2010 - jstage.jst.go.jp
Though miniaturization and mass production via integrated circuit fabrication techniques
have transformed our society, the methods have yet to be successfully applied to the …

Sunlight-powered sustained flight of an ultralight micro aerial vehicle

W Shen, J Peng, R Ma, J Wu, J Li, Z Liu, J Leng, X Yan… - Nature, 2024 - nature.com
Limited flight duration is a considerable obstacle to the widespread application of micro
aerial vehicles (MAVs),–, especially for ultralightweight MAVs weighing less than 10 g …

Combustion process and entropy generation in a novel microcombustor with a block insert

Y Wenming, J Dongyue, CKY Kenny, Z Dan… - Chemical Engineering …, 2015 - Elsevier
A novel micro combustor with block insert has been introduced in this work. The effect of
block insert on wall temperature distribution and entropy generation of the micro combustor …

A cm scale electret-based electrostatic wind turbine for low-speed energy harvesting applications

M Perez, S Boisseau, P Gasnier… - Smart materials and …, 2016 - iopscience.iop.org
This paper presents a small-scale airflow energy harvester built on an axial turbine
architecture and exploiting an electret-based electrostatic converter. When the airflow …

Biologically inspired electrostatic artificial muscles for insect-sized robots

H Wang, P York, Y Chen, S Russo… - … Journal of Robotics …, 2021 - journals.sagepub.com
Millimeter-sized electrostatic film actuators, inspired by the efficient spatial arrangement of
insect muscles, achieve a muscle-like power density (61 W kg− 1) and enable robotic …

Dual spring force couples yield multifunctionality and ultrafast, precision rotation in tiny biomechanical systems

GP Sutton, R St Pierre, CY Kuo… - Journal of …, 2022 - journals.biologists.com
Small organisms use propulsive springs rather than muscles to repeatedly actuate high
acceleration movements, even when constrained to tiny displacements and limited by …

Recent advances in micromotors

T Mashimo, S Izuhara - IEEE Access, 2020 - ieeexplore.ieee.org
Micromotors are of great interest not only for the miniaturization of current products but also
for the realization of future micromachines that can explore challenging environments. The …

Design, fabrication, and characterization of a rotary micromotor supported on microball bearings

N Ghalichechian, A Modafe, MI Beyaz… - Journal of …, 2008 - ieeexplore.ieee.org
We report the design, fabrication, and characterization of a rotary micromotor supported on
microball bearings. This is the first demonstration of a rotary micromachine with a robust …

Modeling and characterization of comb-actuated resonant microscanners

C Ataman, H Urey - Journal of Micromechanics and …, 2005 - iopscience.iop.org
The dynamics of the out-of-plane comb-drive actuator used in a torsional resonant mode
microscanner is discussed. The microscanner is fabricated using the standard SOI …

Electrostatic in-plane structural superlubric actuator

X Huang, X Xiang, C Li, J Nie, Y Shao, Z Xu… - Nature …, 2025 - nature.com
Micro actuators are widely used in NEMS/MEMS for control and sensing. However, most are
designed with suspended beams anchored at fixed points, causing two main issues …