A review of MEMS inertial switches

Y Cao, Z Xi - Microsystem technologies, 2019 - Springer
A microelectromechanical system (MEMS) inertial switch is both a sensor and an actuator by
only capturing a threshold and a close/open timestamp, yielding unique benefits like lower …

[HTML][HTML] A zero-power sensing MEMS shock sensor with a latch-reset mechanism for multi-threshold events monitoring

RR Reddy, K Komeda, Y Okamoto… - Sensors and Actuators A …, 2019 - Elsevier
This paper presents the design, modeling, fabrication, and testing of a MEMS passive shock
sensor to record multiple threshold events with robust latching mechanism using mass …

Triaxial inertial switch with multiple thresholds and resistive ladder readout

LJ Currano, CR Becker, D Lunking, GL Smith… - Sensors and Actuators A …, 2013 - Elsevier
We describe the design, modeling, fabrication, and testing of a MEMS inertial switch that can
detect accelerations in the x, y, and z axes using a single mass/spring assembly (first …

A parametric analysis based design framework for MEMS g-switch accelerometers

M Ramanathan, N Murali, P Sen, R Pratap - Sensors and Actuators A …, 2021 - Elsevier
We present an experimentally verified novel design framework for MEMS g-switch
acceleration switches. These switches need to engage a physical latch upon sensing a …

A vertical driven inertial micro-switch with dual spring to prolong holding time

W Chen, Z Yang, Y Wang, G Ding… - … Conference on Solid …, 2015 - ieeexplore.ieee.org
In this paper, a new model has been proposed for the design of inertial micro-switch.
Compared with the traditional model consisted by movable-fixed electrode, the electrodes …

[图书][B] Latching microelectromechanical shock sensor systems: design, modeling, and experiments

LJ Currano - 2010 - search.proquest.com
Latching shock sensors are acceleration threshold sensors that trigger when the
acceleration level exceeds the designed acceleration threshold. The latching mechanism …

The Sandia MEMS passive shock sensor: FY08 design summary.

JA Walraven, MS Baker, RC Clemens, JA Mitchell… - 2008 - osti.gov
This report summarizes design and modeling activities for the MEMS passive shock sensor.
It provides a description of past design revisions, including the purposes and major …

[PDF][PDF] Passive Temperature Threshold Sensor

H Steiner - 2014 - researchgate.net
Passive Temperature Threshold Sensor Page 1 DISSERTATION Passive Temperature
Threshold Sensor ausgeführt zum Zwecke der Erlangung des akademischen Grades eines …

The Sandia MEMS Passive Shock Sensor: FY08 testing for functionality, model validation, and technology readiness.

JA Walraven, J Blecke, MS Baker, RC Clemens… - 2008 - osti.gov
This report summarizes the functional, model validation, and technology readiness testing of
the Sandia MEMS Passive Shock Sensor in FY08. Functional testing of a large number of …

[引用][C] A MEMS inertial switch based on nonsilicon surface micromachining technology

Z Yang, G Ding, Y Wang, X Zhao - Micro Electro Mechanical Systems, 2018 - Springer