[HTML][HTML] cMUT technology developments
CD Herickhoff, R van Schaijk - Zeitschrift für Medizinische Physik, 2023 - Elsevier
Capacitive micromachined ultrasonic transducer (cMUT) technology has steadily advanced
since its advent in the mid-1990's. Though cMUTs have not supplanted piezoelectric …
since its advent in the mid-1990's. Though cMUTs have not supplanted piezoelectric …
A review on analytical modeling for collapse mode capacitive micromachined ultrasonic transducer of the collapse voltage and the static membrane deflections
Analytical modeling of capacitive micromachined ultrasonic transducer (CMUT) is one of the
commonly used modeling methods and has the advantages of intuitive understanding of the …
commonly used modeling methods and has the advantages of intuitive understanding of the …
High-efficiency output pressure performance using capacitive micromachined ultrasonic transducers with substrate-embedded springs
Capacitive micromachined ultrasonic transducers (CMUTs) with substrate-embedded
springs offer highly efficient output pressure performance over conventional CMUTs, owing …
springs offer highly efficient output pressure performance over conventional CMUTs, owing …
A novel coupled piezoelectric micromachined ultrasonic transducer based on piston mode
This article presents a piezoelectric micromachined ultrasonic transducer (pMUT) modified
with a piston diaphragm term as piston diaphragm pMUT (PD-pMUT). The transmission …
with a piston diaphragm term as piston diaphragm pMUT (PD-pMUT). The transmission …
An improved displacement model for micro-electro-mechanical-system based ultrasonic transducer
This paper analyses the electrical capacitance, electrostatic force on the membrane and
displacement profile of a silicon nitride based micromachined ultrasonic transducer. These …
displacement profile of a silicon nitride based micromachined ultrasonic transducer. These …
Broadband piezoelectric micromachined ultrasonic transducer with a resonant cavity
This article presents a broadband piezoelectric micromachined ultrasonic transducer
(PMUT) surrounded by a resonant cavity called C-PMUT. The C-PMUT shows two …
(PMUT) surrounded by a resonant cavity called C-PMUT. The C-PMUT shows two …
Piezoelectric micromachined ultrasonic transducers with corrugated diaphragms using surface micromachining
GL Luo, DA Horsley - … on Solid-State Sensors, Actuators and …, 2019 - ieeexplore.ieee.org
A key metric of micromachined ultrasonic transducer (MUT) performance is the volume
velocity, which determines the transmitting output pressure. Here, we present a study to …
velocity, which determines the transmitting output pressure. Here, we present a study to …
Capacitive Micromachined Ultrasonic Transducer (CMUT) Made with SWCNTs/Parylene-C Composite Membranes
J Liu, Y Li, Y Luo, Q Chen - ACS Applied Electronic Materials, 2023 - ACS Publications
Traditional CMUTs are fabricated from silicon-based membranes. However, the poor
flexibility and high cost of silicon-based membranes have resulted in low output pressure …
flexibility and high cost of silicon-based membranes have resulted in low output pressure …
Rational design of CMUTs with annular electrodes for high ultrasonic emission via ESSE enabled stiffness adjustment
Z Li, S Zhang, Y Zhao, S Qin, S Bai, J Yuan, J Li… - Microelectronic …, 2024 - Elsevier
Capacitive micromechanical ultrasonic transducers (CMUTs) with high transmitting acoustic
pressure are in urgent demand in the rapidly growing field of air-coupled and therapeutic …
pressure are in urgent demand in the rapidly growing field of air-coupled and therapeutic …
Experimental characterization of an embossed capacitive micromachined ultrasonic transducer cell
Capacitive Micromachined Ultrasonic Transducer (CMUT) is a promising ultrasonic
transducer in medical diagnosis and therapeutic applications that demand a high output …
transducer in medical diagnosis and therapeutic applications that demand a high output …