A review of the recent applications of aluminum nitride-based piezoelectric devices
Piezoelectric materials have attracted considerable attention over the last two decades
because many technologies utilize their core properties of piezoelectric materials. Previous …
because many technologies utilize their core properties of piezoelectric materials. Previous …
Design and characterization of an aluminum nitride-based MEMS hydrophone with biologically honeycomb architecture
L Jia, L Shi, C Liu, Y Yao, C Sun… - IEEE Transactions on …, 2021 - ieeexplore.ieee.org
In this article, we present a high-performance aluminum nitride (AlN)-based
microelectromechanical system (MEMS) hydrophone sensor, in which the sensing cells are …
microelectromechanical system (MEMS) hydrophone sensor, in which the sensing cells are …
Monolithic single PMUT-on-CMOS ultrasound system with+ 17 dB SNR for imaging applications
This article presents a fully integrated ultrasound system based on a single piezoelectric
micromachined ultrasonic transducer (PMUT) monolithically fabricated with a 0.13 μm …
micromachined ultrasonic transducer (PMUT) monolithically fabricated with a 0.13 μm …
[HTML][HTML] Ceramics for microelectromechanical systems applications: A review
EF Nia, A Kouki - Micromachines, 2024 - pmc.ncbi.nlm.nih.gov
A comprehensive review of the application of different ceramics for MEMS devices is
presented. Main ceramics materials used for MEMS systems and devices including alumina …
presented. Main ceramics materials used for MEMS systems and devices including alumina …
Miniaturized 0.13-μm CMOS front-end analog for AlN PMUT arrays
This paper presents an analog front-end transceiver for an ultrasound imaging system
based on a high-voltage (HV) transmitter, a low-noise front-end amplifier (RX), and a …
based on a high-voltage (HV) transmitter, a low-noise front-end amplifier (RX), and a …
Tent-plate AlN PMUT with a piston-like shape under liquid operation
In this work, a waterproof tent-plate piezoelectric micromachined ultrasonic transducer
(PMUT) with enhanced performance as actuator and sensor in comparison with standard …
(PMUT) with enhanced performance as actuator and sensor in comparison with standard …
Monolithic PMUT-on-CMOS ultrasound system for single pixel acoustic imaging
This paper presents a fully operational integrated ultrasound transceiver based on a single
piezoelectric micromachined ultrasonic transducer (PMUT) monolithically fabricated with a …
piezoelectric micromachined ultrasonic transducer (PMUT) monolithically fabricated with a …
Transducer arrays for 3D ultrasound computed tomography
M Angerer - 2022 - publikationen.bibliothek.kit.edu
Die Ultraschall-Computertomographie (USCT) ist ein vielversprechendes medizinisches
Bildgebungsverfahren zur Früherkennung von Brustkrebs. Am Karlsruher Institut für …
Bildgebungsverfahren zur Früherkennung von Brustkrebs. Am Karlsruher Institut für …
Investigation of performance dependence on transduction diaphragm design for piezoelectric micromachined ultrasonic transducers
C Liu, X Wang, G Wu - Microelectronics Journal, 2024 - Elsevier
One of the most important performance metrics for piezoelectric micromachined ultrasonic
transducers (PMUTs) is their transmitting sensitivity, which is significantly dependent on the …
transducers (PMUTs) is their transmitting sensitivity, which is significantly dependent on the …
A High-Accuracy Ultrasonic Gas Flow Meter Based on Scandium-Doped Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducers
H Liu, X Wang, C Liu, Y Lin, L Zhang… - IEEE Transactions …, 2024 - ieeexplore.ieee.org
This article presents an ultrasonic gas meter based on a scandium-doped aluminum nitride
(Sc0. 2Al0. 8N) piezoelectric micromachined ultrasonic transducer (PMUT) array, where the …
(Sc0. 2Al0. 8N) piezoelectric micromachined ultrasonic transducer (PMUT) array, where the …