Micromachined resonators: A review
This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …
decades in design, modeling, and fabrication of micromachined resonators. Although micro …
CMOS–MEMS resonators: From devices to applications
This review summarizes the reported MEMS resonators integrated monolithically in CMOS
technology and their main applications as oscillator circuits in timing applications and in …
technology and their main applications as oscillator circuits in timing applications and in …
An analytical model for the determination of resonance frequencies of perforated beams
L Luschi, F Pieri - Journal of Micromechanics and …, 2014 - iopscience.iop.org
In this paper, we develop closed expressions for the equivalent bending and shear stiffness
of beams with regular square perforations, and apply them to the problem of determining the …
of beams with regular square perforations, and apply them to the problem of determining the …
Tiny-gap titanium-nitride-composite MEMS resonator designs with high power handling capability
In this work, we have explored the power handling and motional resistance for the MEMS
resonators fabricated using the Titanium-Nitride-Composite (TiN-C) platform on the CMOS …
resonators fabricated using the Titanium-Nitride-Composite (TiN-C) platform on the CMOS …
Suppression of the Af-mediated noise at the top bifurcation point in a MEMS resonator with both hardening and softening hysteretic cycles
We study the nonlinear behavior of a microelectromechanical resonator implemented using
the SilTerra MEMS on CMOS platform. The resonator shows, in a same frequency response …
the SilTerra MEMS on CMOS platform. The resonator shows, in a same frequency response …
Phase-noise reduction in a CMOS-MEMS oscillator under nonlinear MEMS operation
In this paper, we will present an all-CMOS oscillator based on monolithically integrated
MEMS resonators fabricated from the VIA layer (tungsten) of a 0.35 μm CMOS technology …
MEMS resonators fabricated from the VIA layer (tungsten) of a 0.35 μm CMOS technology …
Tunable transimpedance sustaining-amplifier for high impedance CMOS-MEMS resonators
G Sobreviela, A Uranga… - 2014 10th Conference on …, 2014 - ieeexplore.ieee.org
This paper presents a full-custom tunable gain transimpedance amplifier (TIA) designed to
work as a sustaining amplifier for a monolithic CMOS-MEMS oscillator. Based on a …
work as a sustaining amplifier for a monolithic CMOS-MEMS oscillator. Based on a …
Low-phase-noise self-sustaining amplifier IC with parallel capacitance cancellation for low-Q piezoelectric resonator
In this paper, a low-phase-noise self-sustaining amplifier IC with parallel capacitance
cancellation for low-Q piezoelectric resonator is presented. The target of the proposed low …
cancellation for low-Q piezoelectric resonator is presented. The target of the proposed low …
Noise effects on resonator bias polarization in CMOS-MEMS oscillators
In this paper, the effects of noise components in the DC bias voltage of the MEMS-NEMS
resonators, electrostatically driven and capacitively sensed over the total system behavior …
resonators, electrostatically driven and capacitively sensed over the total system behavior …
[PDF][PDF] Open-loop Spectrum Analyzer Integrated Circuit for Nanoresonator Sensing.
H Heo, K Han, H Kim, J Kim, D You… - Sensors & …, 2020 - sensors.myu-group.co.jp
A nanoresonator can be applied as a biochemical sensor based on the change in the mass
of the nanoresonator, and the mass change can be interpreted in the frequency domain. In …
of the nanoresonator, and the mass change can be interpreted in the frequency domain. In …