Advances of SiC-based MOS capacitor hydrogen sensors for harsh environment applications
SiC-based hydrogen sensors have attracted much attention due to applications in harsh
environments. In this paper, harsh environment is defined. Characteristics of SiC-based …
environments. In this paper, harsh environment is defined. Characteristics of SiC-based …
Fully integrated PCR-capillary electrophoresis microsystem for DNA analysis
ET Lagally, CA Emrich, RA Mathies - Lab on a Chip, 2001 - pubs.rsc.org
A fully integrated genomic analysis microsystem including microfabricated heaters,
temperature sensors, and PCR chambers directly connected to capillary electrophoretic …
temperature sensors, and PCR chambers directly connected to capillary electrophoretic …
A Si-micromachined 162-stage two-part Knudsen pump for on-chip vacuum
S An, NK Gupta… - Journal of …, 2013 - ieeexplore.ieee.org
This paper investigates a two-part architecture for a Knudsen vacuum pump with no moving
parts. This type of pump exploits the thermal transpiration that results from the free-molecular …
parts. This type of pump exploits the thermal transpiration that results from the free-molecular …
A device for skin moisture and environment humidity detection
TH Huang, JC Chou, TP Sun, SK Hsiung - Sensors and Actuators B …, 2008 - Elsevier
Water content detection is important for our daily life. For environmental detection, the
relative humidity is an index for comfortable living atmosphere. For skin health, the water …
relative humidity is an index for comfortable living atmosphere. For skin health, the water …
Fast response hydrogen sensors based on palladium and platinum/porous 3C-SiC Schottky diodes
KS Kim, GS Chung - Sensors and Actuators B: Chemical, 2011 - Elsevier
Porous 3C-SiC (pSiC) samples with an average pore diameter of 30nm were prepared by
electrochemical anodization. Planar type Schottky diodes were fabricated using 1-mm …
electrochemical anodization. Planar type Schottky diodes were fabricated using 1-mm …
H2S Gas Sensing Properties of SnO2:CuO Thin Film Sensors Prepared by E-beam Evaporation
JC Sohn, SE Kim, ZW Kim, YS Yu - Transactions on electrical and …, 2009 - koreascience.kr
Abstract $ H_2S $ micro-gas sensors have been developed employing $ SnO_2 $: CuO
composite thin films. The films were prepared by e-beam evaporation of Sn and Cu metals …
composite thin films. The films were prepared by e-beam evaporation of Sn and Cu metals …
Direct patterning of microelectrode arrays using femtosecond laser micromachining
CJ Hayden, C Dalton - Applied Surface Science, 2010 - Elsevier
Micron-resolution microelectrodes and microelectrode arrays are commonly used in Lab-on-
a-chip applications, typically for particle and fluidic sensing or pumping applications. The …
a-chip applications, typically for particle and fluidic sensing or pumping applications. The …
Silicon bridge type micro-gas sensor array
Silicon bridge type micro-gas sensor array was fabricated for detecting hydrogen sulfide
(H2S) and ethanol (C2H5OH) gases simultaneously. Anisotropic wet etching of silicon in …
(H2S) and ethanol (C2H5OH) gases simultaneously. Anisotropic wet etching of silicon in …
Electrothermal micromirror with dual-reflective surfaces for circumferential scanning endoscopic imaging
We report the design, fabrication, and measurements of a dual-reflective, single-crystal
silicon-based micromirror that can perform circumferential scanning for endoscopic optical …
silicon-based micromirror that can perform circumferential scanning for endoscopic optical …
The CeO2–TiO2 composite material for improving response speed of detecting low-concentration formaldehyde
YK Tang, J Gong, YY Gou, H Wang, L Yu - Applied Nanoscience, 2022 - Springer
To promote response speed of the TiO2-based material, CeO2 nano-cube is synthesized
through hydrothermal method with high process compatibility as nonmetallic composite. The …
through hydrothermal method with high process compatibility as nonmetallic composite. The …