Ion beam lithography and nanofabrication: a review
To overcome the diffraction constraints of traditional optical lithography, the next generation
lithographies (NGLs) will utilize any one or more of EUV (extreme ultraviolet), X-ray, electron …
lithographies (NGLs) will utilize any one or more of EUV (extreme ultraviolet), X-ray, electron …
Gas-assisted focused electron beam and ion beam processing and fabrication
I Utke, P Hoffmann, J Melngailis - … of Vacuum Science & Technology B …, 2008 - pubs.aip.org
Beams of electrons and ions are now fairly routinely focused to dimensions in the nanometer
range. Since the beams can be used to locally alter material at the point where they are …
range. Since the beams can be used to locally alter material at the point where they are …
Focused-ion-beam-induced deposition of superconducting nanowires
ES Sadki, S Ooi, K Hirata - Applied Physics Letters, 2004 - pubs.aip.org
Superconducting nanowires, with a critical temperature of 5.2 K, have been synthesized
using an ion-beam-induced deposition, with a gallium focused ion beam and tungsten …
using an ion-beam-induced deposition, with a gallium focused ion beam and tungsten …
Three-dimensional microfabrication using local electrophoresis deposition and a laser trapping technique
T Takai, H Nakao, F Iwata - Optics express, 2014 - opg.optica.org
We describe a novel fabrication method of three-dimensional (3D) microstructures using
local electrophoresis deposition together with laser trapping. A liquid cell consisting of two …
local electrophoresis deposition together with laser trapping. A liquid cell consisting of two …
Highly Conductive Paths in Diamond and their Application in High Pressure Measurements
M Gramala, A Sikora, A Chudzyńska… - … Applied Materials & …, 2024 - ACS Publications
Diamonds possess exceptional properties such as high mechanical strength, thermal
conductivity, and electrical resistance, making them suitable for various applications …
conductivity, and electrical resistance, making them suitable for various applications …
Local electrophoresis deposition assisted by laser trapping coupled with a spatial light modulator for three-dimensional microfabrication
T Matsuura, T Takai, F Iwata - Japanese Journal of Applied …, 2017 - iopscience.iop.org
We describe a novel three-dimensional fabrication technique using local electrophoresis
deposition assisted by laser trapping coupled with a spatial light modulator (SLM). In a …
deposition assisted by laser trapping coupled with a spatial light modulator (SLM). In a …
Nanofabrication, nanoinstrumentation and nanoassembly by nanorobotic manipulation
A nanolaboratory is proposed to realize the capabilities of nanofabrication,
nanoinstrumentation and nanoassembly to make three-dimensional structures, devices and …
nanoinstrumentation and nanoassembly to make three-dimensional structures, devices and …
Bio-inspired photonic and plasmonic systems for gas sensing: applications, fabrication, and analytical methods
AL Musgrove, A Cockerham, JJ Pazos… - Journal of Optical …, 2024 - spiedigitallibrary.org
We review progress in the development of photonic platforms for detecting gases. Unlike
sensors based on conventional refractive and diffractive optics, photonic sensors detect …
sensors based on conventional refractive and diffractive optics, photonic sensors detect …
Density determination of focused-electron-beam-induced deposits with simple cantilever-based method
Freestanding deposits are grown on a silicon cantilever from a precursor gas by an electron
induced process. Deposit mass determination is performed with an atomic force microscopy …
induced process. Deposit mass determination is performed with an atomic force microscopy …
Active immobilization of biomolecules on a hybrid three-dimensional nanoelectrode by dielectrophoresis for single-biomolecule study
T Yamamoto, T Fujii - Nanotechnology, 2007 - iopscience.iop.org
We propose and experimentally demonstrate a method of active immobilization for
biomolecules on a three-dimensional nanometre-scale electrode (3D nanoelectrode) using …
biomolecules on a three-dimensional nanometre-scale electrode (3D nanoelectrode) using …