On-body piezoelectric energy harvesters through innovative designs and conformable structures
SV Fernandez, F Cai, S Chen, E Suh… - ACS Biomaterials …, 2021 - ACS Publications
Recent advancements in wearable technology have improved lifestyle and medical
practices, enabling personalized care ranging from fitness tracking, to real-time health …
practices, enabling personalized care ranging from fitness tracking, to real-time health …
Semiconductor piezoresistance for microsystems
AA Barlian, WT Park, JR Mallon… - Proceedings of the …, 2009 - ieeexplore.ieee.org
Piezoresistive sensors are among the earliest micromachined silicon devices. The need for
smaller, less expensive, higher performance sensors helped drive early micromachining …
smaller, less expensive, higher performance sensors helped drive early micromachining …
[PDF][PDF] Silicon piezoresistive stress sensors and their application in electronic packaging
JC Suhling, RC Jaeger - IEEE sensors journal, 2001 - js-engineering.com
Structural reliability of integrated circuit (IC) chips in electronic packages continues to be a
major concern due to ever-increasing die size, circuit densities, power dissipation, operating …
major concern due to ever-increasing die size, circuit densities, power dissipation, operating …
CMOS stress sensors on [100] silicon
RC Jaeger, JC Suhling, R Ramani… - IEEE journal of solid …, 2000 - ieeexplore.ieee.org
CMOS analog stress sensor circuits based upon the piezoresistive behavior of MOSFET's
are presented. On the [100] surface, these circuits provide temperature-compensated …
are presented. On the [100] surface, these circuits provide temperature-compensated …
Piezoresistive characteristics of short-channel MOSFETs on (100) silicon
AT Bradley, RC Jaeger, JC Suhling… - IEEE Transactions on …, 2001 - ieeexplore.ieee.org
This paper demonstrates that the intrinsic piezoresistive response of the MOSFET channel is
independent of length. The reported fall-off of the piezoresistive response of the transistor in …
independent of length. The reported fall-off of the piezoresistive response of the transistor in …
[PDF][PDF] Evaluation of piezoresistive coefficient variation in silicon stress sensors using a four-point bending test fixture
RE Beaty, RC Jaeger, JC Suhling, RW Johnson… - IEEE Transactions on …, 1992 - Citeseer
Absh. act-In this paper, a study of the variation of the piezore-sistive coefficients from several
rosettes on the same die, the same wafer, and finally at different doping levels across a …
rosettes on the same die, the same wafer, and finally at different doping levels across a …
Errors associated with the design, calibration and application of piezoresistive stress sensors in (100) silicon
RC Jaeger, JC Suhling… - IEEE Transactions on …, 1994 - ieeexplore.ieee.org
Successful application of piezoresistive sensors for stress measurement requires both
properly designed sensors and accurately calibrated values of the piezoresistive coefficients …
properly designed sensors and accurately calibrated values of the piezoresistive coefficients …
Characterization of Young's modulus of silicon versus temperature using a “beam deflection” method with a four-point bending fixture
CH Cho - Current Applied Physics, 2009 - Elsevier
Young's modulus (E) and Poisson's ratio (ν) are dependent upon the direction on the silicon
surface. In this work, E and ν of silicon have been calculated analytically for any …
surface. In this work, E and ν of silicon have been calculated analytically for any …
The van der Pauw stress sensor
Piezoresistive sensors fabricated on (100) and (111) silicon surfaces are capable of
measuring from four to all six components of the stress state at a point on the surface of an …
measuring from four to all six components of the stress state at a point on the surface of an …
Advanced silicon microstructures, sensors, and systems
This paper presents the progress in silicon‐based biomedical microstructures, material
characterization techniques, and mechanical microsystems by the authors' research team …
characterization techniques, and mechanical microsystems by the authors' research team …