Power consumption is forecast by the International Technology Roadmap of
Semiconductors (ITRS) to pose long-term technical challenges for the semiconductor …

This review summarizes the state of the art of plasma diagnostics on atmospheric pressure
plasmas formed at characteristic length scales of approximately 1 mm or smaller and …

Thanks to their portability and the non‐equilibrium character of the discharges,
microplasmas are finding application in many scientific disciplines. Although microplasma …

By flowing atmospheric pressure air through a direct current powered microhollow cathode
discharge, we were able to generate a 2 cm long plasma jet. With increasing flow rate, the …

Spatially confining atmospheric pressure, non-equilibrium plasmas to dimensions of 1mm or
less is a promising approach to the generation and maintenance of stable glow discharges …

Atmospheric pressure dc glow discharges were generated between a thin cylindrical anode
and a flat cathode. Voltage–current characteristics, visualization of the discharge and …

An overview of the activities of the research groups that have been involved in fabrication,
development and characterization of microplasmas for chemical analysis over the last few …

For the past fifty years of space exploration, mass spectrometry has provided unique
chemical and physical insights on the characteristics of other planetary bodies in the Solar …

Microscale plasmas of micrometer to millimeter range have been attracting much attention in
recent years. Those microplasmas generally operate at high‐pressure regions, including …

Microplasma sources can be integrated into portable devices for applications such as bio-
microelectromechanical system sterilization, small-scale materials processing, and …