Non-Volatile Nano-Electro-Mechanical Switches and Hybrid Circuits in a 16 nm CMOS Back-End-of-Line Process

U Sikder, R Naous, V Stojanović… - IEEE Electron Device …, 2022 - ieeexplore.ieee.org
Reprogrammable non-volatile (NV) vertically-oriented nano-electro-mechanical (NEM)
switches with a compact footprint are successfully implemented using multiple back-end-of …

Analytical Release Voltage Model of Monolithic 3-D Integrated Nanoelectromechanical Memory Switches

JW Lee, GT Park, WY Choi - IEEE Transactions on Electron …, 2024 - ieeexplore.ieee.org
Determining the accurate release voltage (of nanoelectromechanical (NEM) memory
switches is essential for the operation of monolithic 3-D (M3D) CMOS-NEM circuits. In this …

Advanced Ferroelectric Modeling for BEOL Negative Capacitance Nanoelectromechanical Switches

C Finnan, L Tatum, TJK Liu - 2024 International Conference on …, 2024 - ieeexplore.ieee.org
Negative capacitance (NC)-achieved by adding a ferroelectric layer in series with the
dielectric layer (air gap) of an electrostatic actuator-has been proposed as a means of …

[图书][B] Micro-Electro-Mechanical Relay Technology for Beyond-Von-Neumann Computer Architectures

X Hu - 2022 - search.proquest.com
The invention and development of complementary metal-oxide-semiconductor (CMOS)
transistor technology for digital computing have led to a global information technology …