Nanopositioners are high-precision mechatronic devices that are capable of generating
mechanical motion with nanometer or sub-nanometer resolution. With this motion typically …

We present a control scheme for video-rate atomic force microscopy with rosette pattern. The
controller structure involves a feedback internal-model-based controller and a feedforward …

The atomic force microscope (AFM) is an invaluable scientific tool; however, its conventional
implementation as a relatively costly macroscale system is a barrier to its more widespread …

We describe a novel high-bandwidth two degree of freedom microelectromechanical system
nanopositioner. On-chip piezoresistive sensors and four electrostatic actuators are …

We demonstrate the application of internal model control for accurate tracking of spiral scan
trajectories, where the reference signals are orthogonal sinusoids whose amplitudes linearly …

We demonstrate the application of the internal model principle in tracking a sequential
cycloid trajectory to achieve video-rate atomic force microscope (AFM) imaging. To generate …

Single-crystal diamond (SCD) microelectromechanical systems (MEMS) resonators with
lower energy dissipation and higher quality (Q) factors have always been pursued for the …

We present software-based methods for automatic phase control and for mosaicing high-
speed, Lissajous-scanned images. To achieve imaging speeds fast enough for mosaicing …

We present a microelectromechanical system (MEMS)-based closed-loop force sensor,
capable of measuring bidirectional forces along one axis of motion. The device comprises …

This paper proposes the design of a novel flexure-based micromanipulator dedicated to
micro/nano manipulation and assembly tasks. The micromanipulator can provide a …