MEMS for photonic integrated circuits

C Errando-Herranz, AY Takabayashi… - IEEE Journal of …, 2019 - ieeexplore.ieee.org
The field of microelectromechanical systems (MEMS) for photonic integrated circuits (PICs)
is reviewed. This field leverages mechanics at the nanometer to micrometer scale to improve …

Polymer-based MEMS electromagnetic actuator for biomedical application: A review

J Yunas, B Mulyanti, I Hamidah, M Mohd Said… - Polymers, 2020 - mdpi.com
In this study, we present a comprehensive review of polymer-based microelectromechanical
systems (MEMS) electromagnetic (EM) actuators and their implementation in the biomedical …

MEMS actuators and sensors: observations on their performance and selection for purpose

DJ Bell, TJ Lu, NA Fleck… - … of micromechanics and …, 2005 - iopscience.iop.org
This paper presents an exercise in comparing the performance of microelectromechanical
systems (MEMS) actuators and sensors as a function of operating principle. Data have been …

Power consumption reduction scheme of magnetic microactuation using electroplated Cu–Ni nanocomposite

YW Huang, TY Chao, CC Chen, YT Cheng - Applied physics letters, 2007 - pubs.aip.org
This letter presents a power consumption reduction scheme of magnetic microactuation
using Cu–Ni nanocomposite film which is electroplated in alkaline noncyanide based Ni …

Axial-flux permanent magnet machines for micropower generation

AS Holmes, G Hong, KR Pullen - Journal of …, 2005 - ieeexplore.ieee.org
This paper reports on the design, fabrication, and testing of an axial-flux permanent magnet
electromagnetic generator. The generator comprises a polymer rotor with embedded …

Design and fabrication of integrated magnetic MEMS energy harvester for low frequency applications

M Han, Q Yuan, X Sun, H Zhang - Journal of …, 2013 - ieeexplore.ieee.org
An integrated vibration-to-electrical MEMS electromagnetic energy harvester with low
resonant frequency is designed, simulated, fabricated and tested. Special structures and …

The design, fabrication, and testing of an electromagnetic micropump with a matrix-patterned magnetic polymer composite actuator membrane

M Mohd Said, J Yunas, B Bais, AA Hamzah… - Micromachines, 2017 - mdpi.com
A valveless electromagnetic (EM) micropump with a matrix-patterned magnetic polymer
composite actuator membrane structure was successfully designed and fabricated. The …

Single substrate electromagnetic actuator

JS Bintoro, PJ Hesketh - US Patent 7,474,180, 2009 - Google Patents
US7474180B2 - Single substrate electromagnetic actuator - Google Patents US7474180B2
- Single substrate electromagnetic actuator - Google Patents Single substrate …

MEMS for nanopositioning: Design and applications

M Maroufi, AG Fowler… - Journal of …, 2017 - ieeexplore.ieee.org
Nanopositioners are high-precision mechatronic devices that are capable of generating
mechanical motion with nanometer or sub-nanometer resolution. With this motion typically …

Sensors for catheter applications

PJ French, D Tanase, JFL Goosen - Sensors Update, 2003 - Wiley Online Library
Minimally invasive techniques enable diagnostics and surgery to be performed through a
small incision. This greatly reduces the damage to healthy tissue leading to faster recovery …