MEMS for photonic integrated circuits
C Errando-Herranz, AY Takabayashi… - IEEE Journal of …, 2019 - ieeexplore.ieee.org
The field of microelectromechanical systems (MEMS) for photonic integrated circuits (PICs)
is reviewed. This field leverages mechanics at the nanometer to micrometer scale to improve …
is reviewed. This field leverages mechanics at the nanometer to micrometer scale to improve …
Polymer-based MEMS electromagnetic actuator for biomedical application: A review
In this study, we present a comprehensive review of polymer-based microelectromechanical
systems (MEMS) electromagnetic (EM) actuators and their implementation in the biomedical …
systems (MEMS) electromagnetic (EM) actuators and their implementation in the biomedical …
MEMS actuators and sensors: observations on their performance and selection for purpose
This paper presents an exercise in comparing the performance of microelectromechanical
systems (MEMS) actuators and sensors as a function of operating principle. Data have been …
systems (MEMS) actuators and sensors as a function of operating principle. Data have been …
Power consumption reduction scheme of magnetic microactuation using electroplated Cu–Ni nanocomposite
This letter presents a power consumption reduction scheme of magnetic microactuation
using Cu–Ni nanocomposite film which is electroplated in alkaline noncyanide based Ni …
using Cu–Ni nanocomposite film which is electroplated in alkaline noncyanide based Ni …
Axial-flux permanent magnet machines for micropower generation
This paper reports on the design, fabrication, and testing of an axial-flux permanent magnet
electromagnetic generator. The generator comprises a polymer rotor with embedded …
electromagnetic generator. The generator comprises a polymer rotor with embedded …
Design and fabrication of integrated magnetic MEMS energy harvester for low frequency applications
An integrated vibration-to-electrical MEMS electromagnetic energy harvester with low
resonant frequency is designed, simulated, fabricated and tested. Special structures and …
resonant frequency is designed, simulated, fabricated and tested. Special structures and …
The design, fabrication, and testing of an electromagnetic micropump with a matrix-patterned magnetic polymer composite actuator membrane
A valveless electromagnetic (EM) micropump with a matrix-patterned magnetic polymer
composite actuator membrane structure was successfully designed and fabricated. The …
composite actuator membrane structure was successfully designed and fabricated. The …
Single substrate electromagnetic actuator
JS Bintoro, PJ Hesketh - US Patent 7,474,180, 2009 - Google Patents
US7474180B2 - Single substrate electromagnetic actuator - Google Patents US7474180B2
- Single substrate electromagnetic actuator - Google Patents Single substrate …
- Single substrate electromagnetic actuator - Google Patents Single substrate …
MEMS for nanopositioning: Design and applications
Nanopositioners are high-precision mechatronic devices that are capable of generating
mechanical motion with nanometer or sub-nanometer resolution. With this motion typically …
mechanical motion with nanometer or sub-nanometer resolution. With this motion typically …
Sensors for catheter applications
PJ French, D Tanase, JFL Goosen - Sensors Update, 2003 - Wiley Online Library
Minimally invasive techniques enable diagnostics and surgery to be performed through a
small incision. This greatly reduces the damage to healthy tissue leading to faster recovery …
small incision. This greatly reduces the damage to healthy tissue leading to faster recovery …