[HTML][HTML] Ultra-precision diamond turning of optical silicon—a review

LN Abdulkadir, K Abou-El-Hossein, AI Jumare… - … International Journal of …, 2018 - Springer
In traditional approach of silicon optical lens production, grinding, lapping, and polishing are
employed. Success of these steps depends on the quality of the preceding ones; therefore …

Nanoindentation/scratching at finite temperatures: Insights from atomistic-based modeling

SZ Chavoshi, S Xu - Progress in Materials Science, 2019 - Elsevier
Atomistic-based multiscale and molecular dynamics modeling are powerful tools to simulate
the localized strain problems, offering tremendous opportunities to bridge the knowledge …

High effective laser assisted diamond turning of binderless tungsten carbide

K You, F Fang - Journal of Materials Processing Technology, 2022 - Elsevier
Laser assisted diamond turning is a potential approach to increase the surface finish quality
on the hard and brittle materials and to improve diamond tool life. A high effective laser …

Molecular dynamics simulation study of deformation mechanisms in 3C–SiC during nanometric cutting at elevated temperatures

SZ Chavoshi, X Luo - Materials Science and Engineering: A, 2016 - Elsevier
Molecular dynamics (MD) simulation was employed in this study to elucidate the dislocation/
amorphization-based plasticity mechanisms in single crystal 3C–SiC during nanometric …

Molecular dynamics simulation on crystal defects of single-crystal silicon during elliptical vibration cutting

C Liu, S To, X Sheng, J Xu - International Journal of Mechanical Sciences, 2023 - Elsevier
In recent years, elliptical vibration cutting (EVC) has become a promising technique to
fabricate high quality surface of single-crystal silicon. However, our understanding for its …

Numerical investigation on subsurface damage in nanometric cutting of single-crystal silicon at elevated temperatures

C Liu, X Chen, J Ke, Z She, J Zhang, J Xiao… - Journal of Manufacturing …, 2021 - Elsevier
Achieving nanometric surface on single-crystal silicon is important for semiconductor and
optoelectronics industries. In recent years, thermal assisted machining (hot machining) …

Coupling of double grains enforces the grinding process in vibration-assisted scratch: insights from molecular dynamics

Z Hu, Y Chen, Z Lai, Y Yu, X Xu, Q Peng… - Journal of Materials …, 2022 - Elsevier
Coupling of multiple abrasive grains is crucial for the efficiency in the grinding process and
grinder design. Here the coupling effect in a double-grain model in vibration-assisted …

A predictive model of grinding force in silicon wafer self-rotating grinding

J Sun, F Qin, P Chen, T An - International Journal of Machine Tools and …, 2016 - Elsevier
Silicon wafer thinning is mostly performed by the method of self-rotating grinding. In
grinding, the grinding force is a crucial factor of affecting the grinding performance, form …

Prediction and measurement for grinding force in wafer self-rotational grinding

H Tao, Y Liu, D Zhao, X Lu - International Journal of Mechanical Sciences, 2023 - Elsevier
The ultra-precision grinding technology based on a workpiece self-rotational principle is
extensively used for silicon wafer thinning in the chip post-processing. Nevertheless, owing …

Molecular dynamics simulation on cutting mechanism in the hybrid machining process of single-crystal silicon

C Liu, W He, J Chu, J Zhang, X Chen, J Xiao… - Nanoscale Research …, 2021 - Springer
In this paper, molecular dynamics simulations are carried out to investigate the cutting
mechanism during the hybrid machining process combined the thermal and vibration …