A study on chromium thin film with positive photoresist as a masking layer towards the wet bulk micromachining of Borofloat glass

V Sahu, P Dewangan, RV Vardhan, V Rinfela… - Micro and Nano …, 2024 - Springer
Bulk micromachining is commonly used to fabricate microstructures such as deep cavities,
through-holes, and microchannels in glass wafers, which have diverse applications in the …

Investigation of the characteristics of TiN-coating film deposited by arc ion plating method and the feasibility of measuring residual stress according to heat treatment

CS Han, SS Park, MG Chun - Journal of the Korean Physical Society, 2024 - Springer
TiN-coating films have excellent hardness, heat resistance, abrasion resistance, and
corrosion resistance, and are used in a variety of applications, from industrial applications …