Mechanical-resonance-enhanced thin-film magnetoelectric heterostructures for magnetometers, mechanical antennas, tunable RF inductors, and filters

C Tu, ZQ Chu, B Spetzler, P Hayes, CZ Dong, XF Liang… - Materials, 2019 - mdpi.com
The strong strain-mediated magnetoelectric (ME) coupling found in thin-film ME
heterostructures has attracted an ever-increasing interest and enables realization of a great …

Dissipation analysis methods and Q-enhancement strategies in piezoelectric MEMS laterally vibrating resonators: A review

C Tu, JEY Lee, XS Zhang - Sensors, 2020 - mdpi.com
Over the last two decades, piezoelectric resonant sensors based on micro-
electromechanical systems (MEMS) technologies have been extensively studied as such …

Thin-film lithium niobate-on-insulator (LNOI) shear horizontal surface acoustic wave resonators

TH Hsu, KJ Tseng, MH Li - Journal of Micromechanics and …, 2021 - iopscience.iop.org
Thin-film lithium niobate-on-insulator (LNOI) shear horizontal surface acoustic wave resonators
- IOPscience Skip to content IOP Science home Accessibility Help Search Journals Journals list …

Spider web-like phononic crystals for piezoelectric MEMS resonators to reduce acoustic energy dissipation

FH Bao, XQ Wu, X Zhou, QD Wu, XS Zhang, JF Bao - Micromachines, 2019 - mdpi.com
Phononic crystals (PnC) are a remarkable example of acoustic metamaterials with superior
wave attenuation mechanisms for piezoelectric micro-electro-mechanical systems (MEMS) …

Q-factor enhancement of thin-film piezoelectric-on-silicon mems resonator by phononic crystal-reflector composite structure

J Liu, TB Workie, T Wu, Z Wu, K Gong, J Bao… - Micromachines, 2020 - mdpi.com
Thin-film piezoelectric-on-silicon (TPoS) microelectromechanical (MEMS) resonators are
required to have high Q-factor to offer satisfactory results in their application areas, such as …

Piezo-Optomechanical Signal Transduction Using Lamb-Wave Supermodes in a Suspended GalliumArsenide Photonic-Integrated-Circuit Platform

A Khurana, P Jiang, KC Balram - Physical Review Applied, 2022 - APS
Piezoelectric optomechanical platforms present one of the most promising routes towards
efficient transduction of signals from the microwave to the optical frequency domains. While …

Wide acoustic bandgap solid disk-shaped phononic crystal anchoring boundaries for enhancing quality factor in AlN-on-Si MEMS resonators

MWU Siddiqi, JEY Lee - Micromachines, 2018 - mdpi.com
This paper demonstrates the four fold enhancement in quality factor (Q) of a very high
frequency (VHF) band piezoelectric Aluminum Nitride (AlN) on Silicon (Si) Lamb mode …

Figure of merit enhancement of laterally vibrating rf-mems resonators via energy-preserving addendum frame

TB Workie, Z Wu, P Tang, J Bao, K Hashimoto - Micromachines, 2022 - mdpi.com
This paper examines a new technique to improve the figure of merit of laterally vibrating RF-
MEMS resonators through an energy-preserving suspended addendum frame structure …

Quality factor improvement of piezoelectric MEMS resonator by the conjunction of frame structure and phononic crystals

FH Bao, JF Bao, JEY Lee, LL Bao, MA Khan… - Sensors and Actuators A …, 2019 - Elsevier
Recently, piezoelectric resonators fabricated by using MEMS (ie, micro-electro-mechanical
systems) technology have received increasing attention in a large and diverse set of …

Numerical analysis of anchor loss and thermoelastic damping in piezoelectric AlN-on-Si Lamb wave resonators

MWU Siddiqi, P Fedeli, C Tu, A Frangi… - … of Micromechanics and …, 2019 - iopscience.iop.org
Even though many thin-film piezoelectric aluminum nitride (AlN) on silicon (Si) Lamb wave
resonators have been proposed in the literature, little focus has been set on the modeling of …