High-resolution and large-area nanoparticle arrays using EUV interference lithography
W Karim, SA Tschupp, M Oezaslan, TJ Schmidt… - Nanoscale, 2015 - pubs.rsc.org
Well-defined model systems are needed for better understanding of the relationship
between optical, electronic, magnetic, and catalytic properties of nanoparticles and their …
between optical, electronic, magnetic, and catalytic properties of nanoparticles and their …
Investigation of correlative parameters to evaluate EUV lithographic performance of PMMA
K Kim, JW Lee, BG Park, HT Oh, Y Ku, JK Lee, G Lim… - RSC …, 2022 - pubs.rsc.org
Investigations to evaluate the extreme ultraviolet (EUV) lithographic performance of 160 nm
thick poly (methyl methacrylate) with 13.5 nm wavelength EUV light were performed using a …
thick poly (methyl methacrylate) with 13.5 nm wavelength EUV light were performed using a …
Studying resist performance for contact holes printing using EUV interference lithography
Extreme ultraviolet interference lithography (EUV-IL) is a relatively simple and inexpensive
technique that can pattern high-resolution line/space and has been successfully used for the …
technique that can pattern high-resolution line/space and has been successfully used for the …
Latest developments in EUV photoresist evaluation capability at Shanghai Synchrotron Radiation Facility
ZJ Li, CH Qi, BN Li, SM Yang, J Zhao, ZD Lei… - Nuclear Science and …, 2023 - Springer
Evaluating the comprehensive characteristics of extreme ultraviolet (EUV) photoresists is
crucial for their application in EUV lithography, a key process in modern technology. This …
crucial for their application in EUV lithography, a key process in modern technology. This …
Fabrication techniques
X Luo, X Luo - Engineering Optics 2.0: A Revolution in Optical …, 2019 - Springer
Different from well-established and highly refined fabrication processes in EO 1.0, the
fabrication techniques in EO 2.0 are still imperfect, which need to be carefully investigated to …
fabrication techniques in EO 2.0 are still imperfect, which need to be carefully investigated to …
[PDF][PDF] Nanoscale polarizers for light manipulation and sensing applications
A Neviani, MG Pelizzo, AJ Corso, Z Zhao - research.unipd.it
Polarized light plays a significant role in various modern applications such as sunglasses,
display technologies, navigation, and optical communications, which involve multiple …
display technologies, navigation, and optical communications, which involve multiple …
[PDF][PDF] Photomask
Extreme ultraviolet interference lithography (EUV-IL) is relatively simple and inexpensive
technique that can pattern high resolution line/space and has been successfully used for the …
technique that can pattern high resolution line/space and has been successfully used for the …
[PDF][PDF] Nanoscale RSC
W Karim, SA Tschupp, M Oezaslan, T Justus - scholar.archive.org
Well-defined model systems are needed for better understanding of the relationship
between optical, electronic, magnetic, and catalytic properties of these nanoparticles and …
between optical, electronic, magnetic, and catalytic properties of these nanoparticles and …
[PDF][PDF] Materials Properties Of Ultra-Thin Silicon Nanowire Arrays Fabricated By Euv Interference Lithography
D Fan - 2017 - research-collection.ethz.ch
Nanowires have attracted much interest due to their materials properties, such as decreased
thermal conductivity, enhanced optical absorption, and quantum size effects to name a few …
thermal conductivity, enhanced optical absorption, and quantum size effects to name a few …
[PDF][PDF] Single-particle spectro-microscopy of supported metal catalysts prepared using top-down nanofabrication
W Karim - 2017 - research-collection.ethz.ch
Catalysts, which are often nano-sized metal nanoparticles, are of vital importance in
largescale production of fuels and chemicals, in energy conversion processes and in efforts …
largescale production of fuels and chemicals, in energy conversion processes and in efforts …