With the development of next-generation wireless communication and sensing technologies,
there is an increasing demand for high-performance and miniaturized resonators …

The characteristics of the multi-mode resonance behavior of AlN Lamb wave resonators
(LWRs) are theoretically and experimentally investigated for the first time in this paper …

Doped AlN thin films, especially high Sc-ratio AlScN film, have been reported to significantly
improve the piezoelectric properties and draw attention for high performance resonators …

This study lays a foundation for the design of the SH 0 plate acoustic wave (PAW) resonators
based on LiNbO 3 plate, and are applicable to the ultra-wideband filters and next-generation …

Butterfly-shaped aluminum nitride (AlN) plates with anchor-to-plate angle smaller than 90°
are proposed to boost the quality factor (Q) of Lamb wave resonators (LWRs) thanks to the …

This work investigates a co-design approach for fundamental symmetric Lamb wave (S 0)
resonators (LWR) and film bulk acoustic wave resonators (FBAR) in a commercial 8-inch …

This article presents a high quality factor () load sensor based on Sc 0.2 Al 0.8 N/aluminum
nitride (AlN)-on-silicon surface acoustic wave (SAW) resonator. Finite element method …

A Lamb wave is a guided wave that propagates within plate-like structures, with its vibration
mode resulting from the coupling of a longitudinal wave and a shear vertical wave, which …

Surface acoustic wave (SAW) devices based on multi-layer structures have been widely
used in filters and sensors. The electromechanical coupling factor (K 2), which reflects …

Lamb wave modes with type I dispersion characteristics exhibit strong affinity toward multi
transverse modes behavior above resonance frequency (fr) in the AlN Lamb wave …