Transition from interpulse plasmas to afterglows in a pulsed microwave discharge

1Applied Science and Technology Consulting LLC, Centennial, CO, USA

B Gittleman, M Stowell - Modeling, Characterization and …, 2015 - books.google.com
This chapter will discuss the need to optimize films deposited on devices with nanofeatures.
Proper structural engineering of films enhance the yield and reliability of devices as well as …
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