Development trends and perspectives of future sensors and MEMS/NEMS
With the fast development of the fifth-generation cellular network technology (5G), the future
sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems …
sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems …
Recent progress in the energy harvesting technology—from self-powered sensors to self-sustained IoT, and new applications
With the fast development of energy harvesting technology, micro-nano or scale-up energy
harvesters have been proposed to allow sensors or internet of things (IoT) applications with …
harvesters have been proposed to allow sensors or internet of things (IoT) applications with …
[PDF][PDF] A summary review of wireless sensors and sensor networks for structural health monitoring
In recent years, there has been an increasing interest in the adoption of emerging sensing
technologies for instrumentation within a variety of structural systems. Wireless sensors and …
technologies for instrumentation within a variety of structural systems. Wireless sensors and …
Semiconductor piezoresistance for microsystems
AA Barlian, WT Park, JR Mallon… - Proceedings of the …, 2009 - ieeexplore.ieee.org
Piezoresistive sensors are among the earliest micromachined silicon devices. The need for
smaller, less expensive, higher performance sensors helped drive early micromachining …
smaller, less expensive, higher performance sensors helped drive early micromachining …
Silicon MEMS inertial sensors evolution over a quarter century
G Langfelder, M Bestetti, M Gadola - Journal of Micromechanics …, 2021 - iopscience.iop.org
Silicon-based microelectromechanical systems (MEMS) inertial sensors have become
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …
Spherical robots for special purposes: a review on current possibilities
The review discusses the possibilities of different driving mechanisms and sensors of
spherical robots, and a special kind of mobile robots is introduced and discussed. The …
spherical robots, and a special kind of mobile robots is introduced and discussed. The …
A high-precision, wide-bandwidth micromachined tunneling accelerometer
CH Liu, TW Kenny - Journal of microelectromechanical systems, 2001 - ieeexplore.ieee.org
High-precision miniature accelerometers based on electron tunneling transducers have
been successfully fabricated using bulk-silicon micromachining process. This process has …
been successfully fabricated using bulk-silicon micromachining process. This process has …
Design of a wireless active sensing unit for structural health monitoring
Many academic and commercial researchers are exploring the design and deployment of
wireless sensors that can be used for structural monitoring. The concept of intelligent …
wireless sensors that can be used for structural monitoring. The concept of intelligent …
Single wafer encapsulation of MEMS devices
RN Candler, WT Park, H Li, G Yama… - IEEE transactions on …, 2003 - ieeexplore.ieee.org
Packaging of micro-electro-mechanical systems (MEMS) devices has proven to be costly
and complex, and it has been a significant barrier to the commercialization of MEMS. We …
and complex, and it has been a significant barrier to the commercialization of MEMS. We …
Design of piezoresistive MEMS-based accelerometer for integration with wireless sensing unit for structural monitoring
The use of advanced embedded system technologies such as microelectromechanical
system (MEMS) sensors and wireless communications hold great promise for measuring the …
system (MEMS) sensors and wireless communications hold great promise for measuring the …