Development trends and perspectives of future sensors and MEMS/NEMS

J Zhu, X Liu, Q Shi, T He, Z Sun, X Guo, W Liu… - Micromachines, 2019 - mdpi.com
With the fast development of the fifth-generation cellular network technology (5G), the future
sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems …

Recent progress in the energy harvesting technology—from self-powered sensors to self-sustained IoT, and new applications

L Liu, X Guo, W Liu, C Lee - Nanomaterials, 2021 - mdpi.com
With the fast development of energy harvesting technology, micro-nano or scale-up energy
harvesters have been proposed to allow sensors or internet of things (IoT) applications with …

[PDF][PDF] A summary review of wireless sensors and sensor networks for structural health monitoring

JP Lynch, KJ Loh - Shock and vibration digest, 2006 - academia.edu
In recent years, there has been an increasing interest in the adoption of emerging sensing
technologies for instrumentation within a variety of structural systems. Wireless sensors and …

Semiconductor piezoresistance for microsystems

AA Barlian, WT Park, JR Mallon… - Proceedings of the …, 2009 - ieeexplore.ieee.org
Piezoresistive sensors are among the earliest micromachined silicon devices. The need for
smaller, less expensive, higher performance sensors helped drive early micromachining …

Silicon MEMS inertial sensors evolution over a quarter century

G Langfelder, M Bestetti, M Gadola - Journal of Micromechanics …, 2021 - iopscience.iop.org
Silicon-based microelectromechanical systems (MEMS) inertial sensors have become
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …

Spherical robots for special purposes: a review on current possibilities

M Bujňák, R Pirník, K Rástočný, A Janota, D Nemec… - Sensors, 2022 - mdpi.com
The review discusses the possibilities of different driving mechanisms and sensors of
spherical robots, and a special kind of mobile robots is introduced and discussed. The …

A high-precision, wide-bandwidth micromachined tunneling accelerometer

CH Liu, TW Kenny - Journal of microelectromechanical systems, 2001 - ieeexplore.ieee.org
High-precision miniature accelerometers based on electron tunneling transducers have
been successfully fabricated using bulk-silicon micromachining process. This process has …

Design of a wireless active sensing unit for structural health monitoring

JP Lynch, A Sundararajan, KH Law… - … of Structural and …, 2004 - spiedigitallibrary.org
Many academic and commercial researchers are exploring the design and deployment of
wireless sensors that can be used for structural monitoring. The concept of intelligent …

Single wafer encapsulation of MEMS devices

RN Candler, WT Park, H Li, G Yama… - IEEE transactions on …, 2003 - ieeexplore.ieee.org
Packaging of micro-electro-mechanical systems (MEMS) devices has proven to be costly
and complex, and it has been a significant barrier to the commercialization of MEMS. We …

Design of piezoresistive MEMS-based accelerometer for integration with wireless sensing unit for structural monitoring

JP Lynch, A Partridge, KH Law, TW Kenny… - Journal of Aerospace …, 2003 - ascelibrary.org
The use of advanced embedded system technologies such as microelectromechanical
system (MEMS) sensors and wireless communications hold great promise for measuring the …