Rotational transition based clock, rotational spectroscopy cell, and method of making same

JA Herbsommer, BS Cook, P Nadeau… - US Patent …, 2016 - Google Patents
BACKGROUND Atomic clocks use the frequency of the electronic transi tion of an alkali
metal vapor as a frequency reference. Alkali metal gasses. Such as Cesium, Rubidium or …

Hermetically sealed package for mm-wave molecular spectroscopy cell

JA Herbsommer, AJ Fruehling, SJ Jacobs - US Patent 10,364,144, 2019 - Google Patents
Disclosed examples provide gas cells and a method of fabricating a gas cell, including
forming a cavity in a first substrate, forming a first conductive material on a sidewall of the …

Launch structures for a hermetically sealed cavity

AJ Fruehling, BS Cook, JA Herbsommer… - US Patent …, 2019 - Google Patents
An apparatus includes a substrate containing a cavity and a dielectric structure covering at
least a portion of the cavity. The cavity is hermetically sealed. The apparatus also may …

Methods for gas generation in a sealed gas cell cavity

SJ Jacobs, JA Herbsommer, AJ Fruehling - US Patent 10,370,760, 2019 - Google Patents
Described examples include a method of fabricating a gas cell, including forming a cavity in
a first substrate, providing a nonvolatile precursor material in the cavity of the first substrate …

Hermetically sealed molecular spectroscopy cell with buried ground plane

AJ Fruehling, JA Herbsommer, SJ Jacobs… - US Patent …, 2019 - Google Patents
A method for forming a sealed cavity includes bonding a non-conductive structure to a first
substrate to form a non-conductive aperture into the first substrate. On a surface of the non …

Hermetically sealed molecular spectroscopy cell

JA Herbsommer, SJ Jacobs, BS Cook… - US Patent …, 2020 - Google Patents
In one embodiment, a method includes etching a cavity in a first substrate (eg, a
semiconductor wafer), forming a first metal layer on a first surface of the first substrate and in …

Methods for depositing a measured amount of a species in a sealed cavity

BS Cook, K Wachtler, AJ Fruehling… - US Patent …, 2020 - Google Patents
US10544039B2 - Methods for depositing a measured amount of a species in a sealed cavity -
Google Patents US10544039B2 - Methods for depositing a measured amount of a species in …

Pressure measurement based on electromagnetic signal output of a cavity

JA Herbsommer, AJ Fruehling, S Sankaran… - US Patent …, 2019 - Google Patents
A pressure transducer includes a cavity, dipolar molecules disposed within the cavity, and
pressure measurement circuitry. The pressure measurement circuitry is configured to …

Molecular spectroscopy cell with resonant cavity

AJ Fruehling, JA Herbsommer, BS Cook… - US Patent …, 2020 - Google Patents
A device includes a substrate that includes a resonant cavity. The resonant cavity includes a
plurality of dipolar molecules that have an absorption frequency. The resonant cavity …

Hermetically sealed molecular spectroscopy cell with dual wafer bonding

AJ Fruehling, JA Herbsommer, BS Cook… - US Patent …, 2019 - Google Patents
A method includes forming a plurality of layers of an oxide and a metal on a substrate. For
example, the layers may include a metal layer sandwiched between silicon oxide layers. A …